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Journal: Materials, 2018
Volume: 11
Number: 471
Article:
Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing
Authors:
by
Feng Sun, Chen Li, Chaochao Fu, Xiangbiao Zhou, Jun Luo, Wei Zou, Zhi-Jun Qiu and Dongping Wu
Link:
https://www.mdpi.com/1996-1944/11/4/471
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