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Journal: MaterialsVolume: 10Number: 916
Article: Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering
- Authors:
- Junichi Nomoto1,*,
- Katsuhiko Inaba2 and
- Shintaro Kobayashi2
- et al.
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