Parasitic Reflection Eliminating for Planar Elements Based on Multi-Frequency Phase-Shifting in Phase Measuring Deflectometry
Abstract
:1. Introduction
2. Principle
2.1. Phase Measuring Deflectometry Principle
2.2. Phase Extraction with Parasitic Reflection
2.2.1. The Phase Error Model
2.2.2. Calculating Δx and x1
3. Experiments
3.1. Measurement of a 40 mm Thick Standard Planar Element
3.2. Measurement of a 19 mm Flat Glass
4. Discussion
4.1. Limitation
4.2. Range of Application
5. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
- Xu, Y.; Gao, F.; Jiang, X. A brief review of the technological advancements of phase measuring deflectometry. PhotoniX 2020, 1, 14. [Google Scholar] [CrossRef]
- Bothe, T.; Li, W.; von Kopylow, C.; Juptner, W.P.O. High-resolution 3D shape measurement on specular surfaces by fringe reflection. Proc. SPIE 2004, 5457, 411–422. [Google Scholar]
- Huang, L.; Idir, M.; Zuo, C.; Asundi, A. Review of phase measuring deflectometry. Opt. Lasers Eng. 2018, 107, 247–257. [Google Scholar] [CrossRef]
- Burke, J.; Pak, A.; Höfer, S.; Ziebarth, M.; Roschani, M.; Beyerer, J. Deflectometry for specular surfaces: An overview. arXiv 2022, arXiv:2204.11592. [Google Scholar] [CrossRef]
- Su, P.; Wang, Y.; Burge, J.H.; Kaznatcheev, K.; Idir, M. Non-null full field X-ray mirror metrology using SCOTS: A reflection deflectometry approach. Opt. Express 2012, 20, 12393–12406. [Google Scholar] [CrossRef] [PubMed]
- Kewei, E.; Li, D.; Yang, L.J.; Guo, G.; Li, M.; Wang, X.; Zhang, T.; Xiong, Z. Novel method for high accuracy figure measurement of optical flat. Opt. Lasers Eng. 2017, 88, 162–166. [Google Scholar]
- Yue, H.; Wu, Y.; Li, M.; Liu, Y. Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry. Results Phys. 2018, 11, 994–998. [Google Scholar] [CrossRef]
- Zhao, P.; Gao, N.; Zhang, Z.; Gao, F.; Jiang, X. Performance analysis and evaluation of direct phase measuring deflectometry. Opt. Lasers Eng. 2018, 103, 24–33. [Google Scholar] [CrossRef]
- Huang, L.; Asundi, A.K. Phase retrieval from reflective fringe patterns of double-sided transparent objects. Meas. Sci. Technol. 2012, 23, 085201. [Google Scholar] [CrossRef]
- Sprenger, D.; Faber, C.; Seraphim, M.; Häusler, G. UV-deflectometry: No parasitic reflections. In Proceedings of the DGaO 2010; A19 in Germany, Germany, 27 May 2010. [Google Scholar]
- Wang, R.; Li, D.; Xu, K.; Zhang, X.; Luo, P. Parasitic reflection elimination using binary pattern in phase measuring deflectometry. Opt. Commun. 2019, 451, 67–73. [Google Scholar] [CrossRef]
- Cheng, X.-M.; Wang, T.-T.; Zhu, W.-B.; Shi, B.-D.; Chen, W. Phase Deflectometry for Defect Detection of High Reflection Objects. Sensors 2023, 23, 1607. [Google Scholar] [CrossRef]
- Faber, C.; Olesch, E.; Krobot, R.; Häusler, G. Deflectometry challenges interferometry: The competition gets tougher! In Interferometry XVI: Techniques and Analysis; SPIE: Washington, DC, USA, 2012; Volume 8493. [Google Scholar]
- Wang, R.; Li, D.; Li, L.; Xu, K.; Tang, L.; Chen, P.; Wang, Q. Surface shape measurement of transparent plannar elements with phase measuring deflectometry. Opt. Eng. 2018, 57, 104104. [Google Scholar] [CrossRef]
- Tao, S.; Yue, H.; Chen, H.; Wang, T.; Cai, J.; Wu, Y.; Liu, Y. Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry. Results Phys. 2019, 15, 102734. [Google Scholar]
- Ye, J.; Niu, Z.; Zhang, X.; Wang, W.; Xu, M. Simultaneous measurement of double surfaces of transparent lenses with phase measuring deflectometry. Opt. Lasers Eng. 2021, 137, 106356. [Google Scholar] [CrossRef]
- Zheng, W.; Li, D.; Wang, R.; Zhang, X.; Ge, R.; Yu, L. Front and back surface measurement of the transparent planar element based on multi-frequency fringe deflectometry. Opt. Express 2022, 20, 35409–35430. [Google Scholar] [CrossRef] [PubMed]
- Leung, Y.; Cai, L. Untangling parasitic reflection in phase measuring deflectometry by multi-frequency phase-shifting. Appl. Opt. 2022, 61, 208–222. [Google Scholar] [CrossRef]
- Ettl, S.; Kaminski, J.; Knauer, M.C.; Häusler, G. Shape reconstruction from gradient data. Appl. Opt. 2008, 47, 2091–2097. [Google Scholar] [CrossRef] [PubMed]
- Huang, L.; Asundi, A. Improvement of least-squares integration method with iterative compensations in fringe reflectometry. Appl. Opt. 2012, 51, 7459–7465. [Google Scholar] [CrossRef]
- Southwell, W.H. Wave-front estimation from wave-front slope measurements. JOSA 1980, 70, 998–1006. [Google Scholar] [CrossRef]
- Knauer, M.C.; Kaminski, J.; Häusler, G. Phase measuring deflectometry: A new approach to measure specular free-form surfaces. Proc. SPIE 2004, 5457, 366–376. [Google Scholar]
- Zhang, Z. A flexible new technique for camera calibration. IEEE Trans. Pattern Anal. Mach. Intell. 2000, 22, 1330–1334. [Google Scholar] [CrossRef]
- Huntley, J.M.; Saldner, H. Temporal phase-unwrapping algorithm for automated interferogram analysis. Appl. Opt. 1993, 32, 3047–3052. [Google Scholar] [CrossRef] [PubMed]
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Huang, S.; Liu, Y.; Yu, X. Parasitic Reflection Eliminating for Planar Elements Based on Multi-Frequency Phase-Shifting in Phase Measuring Deflectometry. Sensors 2024, 24, 1239. https://doi.org/10.3390/s24041239
Huang S, Liu Y, Yu X. Parasitic Reflection Eliminating for Planar Elements Based on Multi-Frequency Phase-Shifting in Phase Measuring Deflectometry. Sensors. 2024; 24(4):1239. https://doi.org/10.3390/s24041239
Chicago/Turabian StyleHuang, Siya, Yuankun Liu, and Xin Yu. 2024. "Parasitic Reflection Eliminating for Planar Elements Based on Multi-Frequency Phase-Shifting in Phase Measuring Deflectometry" Sensors 24, no. 4: 1239. https://doi.org/10.3390/s24041239
APA StyleHuang, S., Liu, Y., & Yu, X. (2024). Parasitic Reflection Eliminating for Planar Elements Based on Multi-Frequency Phase-Shifting in Phase Measuring Deflectometry. Sensors, 24(4), 1239. https://doi.org/10.3390/s24041239