Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors

Huang, Jue; Dai, Keren; Yin, Yajiang; Chen, Zhaorong; You, Zheng; Wang, Xiaofeng

doi:10.3390/s22239268

Open AccessArticle

Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors

by

Jue Huang

^1,2,

Keren Dai

^3,*

,

Yajiang Yin

^1,2,

Zhaorong Chen

^1,2,

Zheng You

^1,2 and

Xiaofeng Wang

^1,2,*

¹

Department of Precision Instrument, Tsinghua University, Beijing 100084, China

²

Beijing Advanced Innovation Center for Integrated Circuits, Beijing 100084, China

³

ZNDY of Ministerial Key Laboratory, School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China

^*

Authors to whom correspondence should be addressed.

Sensors 2022, 22(23), 9268; https://doi.org/10.3390/s22239268

Submission received: 8 November 2022 / Revised: 24 November 2022 / Accepted: 26 November 2022 / Published: 28 November 2022

(This article belongs to the Special Issue Integration of Sensing and Energy Supply)

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Abstract

The integrated device for energy supply and sensing (IDESS) is a potential candidate for relieving the energy and space burdens caused by the rising integration degrees of microsystems. In this article, we propose a force sensor based on an interdigital supercapacitor (IDTSC). The capacitance and internal resistance of the IDTSC change under external loads, resulting in a transient current fluctuation at a constant bias voltage, which can be used to sense external force/acceleration. The IDTSC showed a specific energy and specific power of 4.16 Wh/kg and 22.26 W/kg (at 0.1 A/g), respectively, which could maintain an essential energy supply. According to the simulation analysis, the designed IDTSC’s current response exhibited good linearity with the external force. In addition, benefiting from its light weight and the applied gel electrolytes, the IDTSC showed good high-g impact sensing performance (from 9.9 × 10³× g to 3.2 × 10⁴× g). This work demonstrated the feasibility of realizing an integrated energy supply and force-sensing device by empowering energy storage devices with sensing capabilities.

Keywords: supercapacitor; interdigital; sensing; integration

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MDPI and ACS Style

Huang, J.; Dai, K.; Yin, Y.; Chen, Z.; You, Z.; Wang, X. Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors. Sensors 2022, 22, 9268. https://doi.org/10.3390/s22239268

AMA Style

Huang J, Dai K, Yin Y, Chen Z, You Z, Wang X. Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors. Sensors. 2022; 22(23):9268. https://doi.org/10.3390/s22239268

Chicago/Turabian Style

Huang, Jue, Keren Dai, Yajiang Yin, Zhaorong Chen, Zheng You, and Xiaofeng Wang. 2022. "Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors" Sensors 22, no. 23: 9268. https://doi.org/10.3390/s22239268

APA Style

Huang, J., Dai, K., Yin, Y., Chen, Z., You, Z., & Wang, X. (2022). Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors. Sensors, 22(23), 9268. https://doi.org/10.3390/s22239268

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Design and Fabrication of Interdigital Supercapacitors as Force/Acceleration Sensors

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