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Sun C, Liu Y, Li B, Su W, Luo M, Du G, Wu Y. Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. Sensors. 2021; 21(16):5513. https://doi.org/10.3390/s21165513

Sun, Changhe, Yufei Liu, Bolun Li, Wenqu Su, Mingzhang Luo, Guofeng Du, and Yaming Wu. 2021. "Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles" Sensors 21, no. 16: 5513. https://doi.org/10.3390/s21165513

Sun, C., Liu, Y., Li, B., Su, W., Luo, M., Du, G., & Wu, Y. (2021). Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. Sensors, 21(16), 5513. https://doi.org/10.3390/s21165513