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Article

Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement

1
Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
2
Science Island Branch of Graduate School, University of Science and Technology of China, Hefei 230026, China
*
Author to whom correspondence should be addressed.
Sensors 2020, 20(5), 1270; https://doi.org/10.3390/s20051270
Received: 19 January 2020 / Revised: 21 February 2020 / Accepted: 24 February 2020 / Published: 26 February 2020
(This article belongs to the Section Optical Sensors)
A fully integrated photoacoustic nitrogen dioxide (NO2) sensor is developed and demonstrated. In this sensor, an embedded photoacoustic cell was manufactured by using an up-to-date 3D printing technique. A blue laser diode was used as a light source for excitation of photoacoustic wave in the photoacoustic cell. The photoacoustic wave is detected by a sensitive microelectromechanical system (MEMS) microphone. Homemade circuits are integrated into the sensor for laser diode driving and signal processing. The sensor was calibrated by using a chemiluminescence NO–NO2–NOX gas analyzer. And the performance of this sensor was evaluated. The linear relationship between photoacoustic signals and NO2 concentrations was verified in a range of below 202 ppb. The limit of detection was determined to 0.86 ppb with an integration time of 1 s. The corresponding normalized noise equivalent absorption was 2.0 × 10−8 cm−1∙W∙Hz−1/2. The stability and the optimal integration time were evaluated with an Allan deviation analysis, from which a detection limit of 0.25 ppb at the optimal integration time of 240 s was obtained. The sensor was used to measure outdoor air and the results agree with that obtained from the NO–NO2–NOX gas analyzer. The low-cost and portable photoacoustic NO2 sensor has a potential application for atmospheric NO2 monitoring. View Full-Text
Keywords: nitrogen dioxide; photoacoustic spectroscopy; integrated sensor; detection limit nitrogen dioxide; photoacoustic spectroscopy; integrated sensor; detection limit
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MDPI and ACS Style

Dong, Y.; Gu, M.; Zhu, G.; Tan, T.; Liu, K.; Gao, X. Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement. Sensors 2020, 20, 1270. https://doi.org/10.3390/s20051270

AMA Style

Dong Y, Gu M, Zhu G, Tan T, Liu K, Gao X. Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement. Sensors. 2020; 20(5):1270. https://doi.org/10.3390/s20051270

Chicago/Turabian Style

Dong, Yang, Mingsi Gu, Gongdong Zhu, Tu Tan, Kun Liu, and Xiaoming Gao. 2020. "Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement" Sensors 20, no. 5: 1270. https://doi.org/10.3390/s20051270

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