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Open AccessArticle

Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

1
Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201800, China
2
Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China
3
University of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing 100049, China
*
Author to whom correspondence should be addressed.
Sensors 2020, 20(22), 6660; https://doi.org/10.3390/s20226660
Received: 5 November 2020 / Revised: 16 November 2020 / Accepted: 18 November 2020 / Published: 20 November 2020
(This article belongs to the Special Issue EUV and X-ray Wavefront Sensing)
A speckle-based method for the X-ray crystal diffraction wavefront measurement is implemented, and the slope errors of channel-cut crystals with different surface characteristics are measured. The method uses a speckle scanning technique generated by a scattering membrane translated using a piezo motor to infer the deflection of X-rays from the crystals. The method provides a high angular sensitivity of the channel-cut crystal slopes in both the tangential and sagittal directions. The experimental results show that the slope error of different cutting and etching processes ranges from 0.25 to 2.98 μrad. Furthermore, the results of wavefront deformation are brought into the beamline for simulation. This method opens up possibilities for new high-resolution applications for X-ray crystal diffraction wavefront measurement and provides feedback to crystal manufacturers to improve channel-cut fabrication. View Full-Text
Keywords: X-ray crystal diffraction wavefront; channel-cut crystal; speckle-based method X-ray crystal diffraction wavefront; channel-cut crystal; speckle-based method
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MDPI and ACS Style

Xue, L.; Luo, H.; Diao, Q.; Yang, F.; Wang, J.; Li, Z. Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique. Sensors 2020, 20, 6660.

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