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Meinel K, Melzer M, Stoeckel C, Shaporin A, Forke R, Zimmermann S, Hiller K, Otto T, Kuhn H. 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. Sensors. 2020; 20(22):6599. https://doi.org/10.3390/s20226599

Meinel, Katja, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke, Sven Zimmermann, Karla Hiller, Thomas Otto, and Harald Kuhn. 2020. "2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride" Sensors 20, no. 22: 6599. https://doi.org/10.3390/s20226599

Meinel, K., Melzer, M., Stoeckel, C., Shaporin, A., Forke, R., Zimmermann, S., Hiller, K., Otto, T., & Kuhn, H. (2020). 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. Sensors, 20(22), 6599. https://doi.org/10.3390/s20226599