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Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors
Open AccessArticle

Error Analysis and Modeling for an Absolute Capacitive Displacement Measuring System with High Accuracy and Long Range

by Dongdong Zhang 1,2,3, Li Lin 1,2,3,4,* and Quanshui Zheng 1,2,3,4
1
State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
2
Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
3
Center for Nano and Micro Mechanics, Tsinghua University, Beijing 100084, China
4
Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(24), 5339; https://doi.org/10.3390/s19245339 (registering DOI)
Received: 13 October 2019 / Revised: 1 December 2019 / Accepted: 2 December 2019 / Published: 4 December 2019
(This article belongs to the Special Issue Sensors for Precision Dimensional Metrology)
We proposed a novel kind of absolute capacitive grating displacement measuring system with both high accuracy and long range in a previous article. The measuring system includes both a MOVER and a STATOR, the contact surfaces of which are coated by a thin layer of dielectric film with a low friction coefficient and high hardness. The measuring system works in contact mode to minimize the gap changes. This paper presents a theoretical analysis of the influence of some factors, including fabrication errors, installation errors, and environment disturbance, on measurement signals. The measuring signal model was modified according to the analysis. The signal processing methods were investigated to improve the signal sensitivity and signal-to-noise ratio (SNR). The displacement calculation model shows that the design of orthogonal signals can solve the dead-zone problem. Absolute displacement was obtained by a simple method using two coarse signals and highly accurate displacement was further obtained while using two fine signals with the help of absolute information. According to the displacement calculation model and error analysis, the error in fine calculation functions mainly determines the model’s accuracy and is locally affected by coarse calculation functions. It was also determined that amplitude differences, non-orthogonality, and signal offsets are not related to the accuracy of the displacement calculation model. The experiments were carried out to confirm the abovementioned theoretical analysis. The experimental results show that the displacement resolution and error in the displacement calculation model reach ±4.8 nm and ±34 nm, respectively, in the displacement range of 5 mm. The experiments and the theoretical analyses both indicate that our proposed measuring system has great potential for achieving an accuracy of tens of nanometers and a range of hundreds of millimeters. View Full-Text
Keywords: absolute displacement measurement; nanometer accuracy; long range; error analysis absolute displacement measurement; nanometer accuracy; long range; error analysis
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MDPI and ACS Style

Zhang, D.; Lin, L.; Zheng, Q. Error Analysis and Modeling for an Absolute Capacitive Displacement Measuring System with High Accuracy and Long Range. Sensors 2019, 19, 5339.

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