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Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen

1
Key Laboratory of Non-Destructive Testing Ministry of Education, Nanchang HangKong University, Nanchang 330063, China
2
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
3
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(16), 3560; https://doi.org/10.3390/s19163560
Received: 5 July 2019 / Revised: 13 August 2019 / Accepted: 14 August 2019 / Published: 15 August 2019
(This article belongs to the Section Physical Sensors)
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Abstract

A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device. View Full-Text
Keywords: Pd-Ni alloy thin-film; hydrogen sensor; surface acoustic wave; working stability; differential oscillation loop Pd-Ni alloy thin-film; hydrogen sensor; surface acoustic wave; working stability; differential oscillation loop
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Wang, W.; Liu, X.; Mei, S.; Liu, M.; Lu, C.; Lu, M. Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen. Sensors 2019, 19, 3560.

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