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Volume 17
Issue 12
10.3390/s17122774
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Article

Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices

by
Dong Uk Kim
,
Chan Bae Jeong
,
Jung Dae Kim
,
Kye-Sung Lee
,
Hwan Hur
,
Ki-Hwan Nam
,
Geon Hee Kim
and
Ki Soo Chang
*
Division of Scientific Instrumentation, Korea Basic Science Institute, 169-148 Gwahak-ro, Yuseong-gu, Daejeon 34133, Korea
*
Author to whom correspondence should be addressed.
Sensors 2017, 17(12), 2774; https://doi.org/10.3390/s17122774
Submission received: 20 October 2017 / Revised: 24 November 2017 / Accepted: 27 November 2017 / Published: 30 November 2017
(This article belongs to the Section Physical Sensors)
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Abstract

In this paper, we report on a confocal thermoreflectance imaging system that can examine the thermal characteristics of microelectronic devices by penetrating the backside of a device through the substrate. In this system, the local reflectivity variations due to heat generation in the device are measured point by point by a laser scanning confocal microscope capable of eliminating out-of-focus reflections and the thermoreflectance is extracted via Fourier-domain signal processing. In comparison to the conventional widefield thermoreflectance microscope, the proposed laser scanning confocal thermoreflectance microscope improves the thermoreflectance sensitivity by ~23 times and the spatial resolution by ~25% in backside thermoreflectance measurements.
Keywords: thermal imaging; reflection; confocal microscopy thermal imaging; reflection; confocal microscopy

Share and Cite

MDPI and ACS Style

Kim, D.U.; Jeong, C.B.; Kim, J.D.; Lee, K.-S.; Hur, H.; Nam, K.-H.; Kim, G.H.; Chang, K.S. Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices. Sensors 2017, 17, 2774. https://doi.org/10.3390/s17122774

AMA Style

Kim DU, Jeong CB, Kim JD, Lee K-S, Hur H, Nam K-H, Kim GH, Chang KS. Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices. Sensors. 2017; 17(12):2774. https://doi.org/10.3390/s17122774

Chicago/Turabian Style

Kim, Dong Uk, Chan Bae Jeong, Jung Dae Kim, Kye-Sung Lee, Hwan Hur, Ki-Hwan Nam, Geon Hee Kim, and Ki Soo Chang. 2017. "Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices" Sensors 17, no. 12: 2774. https://doi.org/10.3390/s17122774

APA Style

Kim, D. U., Jeong, C. B., Kim, J. D., Lee, K.-S., Hur, H., Nam, K.-H., Kim, G. H., & Chang, K. S. (2017). Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices. Sensors, 17(12), 2774. https://doi.org/10.3390/s17122774

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