Next Article in Journal
Proton Radiation Effects on Dark Signal Distribution of PPD CMOS Image Sensors: Both TID and DDD Effects
Previous Article in Journal
Using Spherical-Harmonics Expansions for Optics Surface Reconstruction from Gradients
Open AccessArticle

Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices

Division of Scientific Instrumentation, Korea Basic Science Institute, 169-148 Gwahak-ro, Yuseong-gu, Daejeon 34133, Korea
*
Author to whom correspondence should be addressed.
Sensors 2017, 17(12), 2774; https://doi.org/10.3390/s17122774
Received: 20 October 2017 / Revised: 24 November 2017 / Accepted: 27 November 2017 / Published: 30 November 2017
(This article belongs to the Section Physical Sensors)
In this paper, we report on a confocal thermoreflectance imaging system that can examine the thermal characteristics of microelectronic devices by penetrating the backside of a device through the substrate. In this system, the local reflectivity variations due to heat generation in the device are measured point by point by a laser scanning confocal microscope capable of eliminating out-of-focus reflections and the thermoreflectance is extracted via Fourier-domain signal processing. In comparison to the conventional widefield thermoreflectance microscope, the proposed laser scanning confocal thermoreflectance microscope improves the thermoreflectance sensitivity by ~23 times and the spatial resolution by ~25% in backside thermoreflectance measurements. View Full-Text
Keywords: thermal imaging; reflection; confocal microscopy thermal imaging; reflection; confocal microscopy
Show Figures

Figure 1

MDPI and ACS Style

Kim, D.U.; Jeong, C.B.; Kim, J.D.; Lee, K.-S.; Hur, H.; Nam, K.-H.; Kim, G.H.; Chang, K.S. Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices. Sensors 2017, 17, 2774.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop