The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures
AbstractWe report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital transducers with a periodic length of 24 μm were patterned by lift-off photolithography techniques on the AlN films/TC4 structure, while the AlN film thickness was in the range 1.5–3.5 μm. The device performances in terms of quality factor (Q-factor) and electromechanical coupling coefficient (k2) were determined from the measure S11 parameters. The Q-factor and k2 were strongly dependent not only on the normalized AlN film thickness but also on the full-width at half-maximum (FWHM) of AlN (002) peak. The dispersion curve of the SAW phase velocity was analyzed, and the experimental results showed a good agreement with simulations. The temperature behaviors of the devices were also presented and discussed. The prepared SAW resonators based on AlN/TC4 structure have potential applications in integrated micromechanical sensing systems. View Full-Text
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Shu, L.; Peng, B.; Li, C.; Gong, D.; Yang, Z.; Liu, X.; Zhang, W. The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures. Sensors 2016, 16, 526.
Shu L, Peng B, Li C, Gong D, Yang Z, Liu X, Zhang W. The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures. Sensors. 2016; 16(4):526.Chicago/Turabian Style
Shu, Lin; Peng, Bin; Li, Chuan; Gong, Dongdong; Yang, Zhengbing; Liu, Xingzhao; Zhang, Wanli. 2016. "The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures." Sensors 16, no. 4: 526.
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