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Sensors 2015, 15(12), 30293-30310;

Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity

School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 11 October 2015 / Revised: 11 November 2015 / Accepted: 25 November 2015 / Published: 3 December 2015
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [5125 KB, uploaded 3 December 2015]   |  


This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork (DETF) resonators, and the frequency output of two DETFs exhibits a differential shift. The dies of an SMRA are fabricated using silicon-on-insulator (SOI) processing and wafer-level vacuum packaging. This research aims to design a high-sensitivity SMRA because a high sensitivity allows for the acceleration signal to be easily demodulated by frequency counting techniques and decreases the noise level. This study applies the energy-consumed concept and the Nelder-Mead algorithm in the SMRA to address the design issues and further increase its sensitivity. Using this novel method, the sensitivity of the SMRA has been increased by 66.1%, which attributes to both the re-designed DETF and the reduced energy loss on the micro-lever. The results of both the closed-form and finite-element analyses are described and are in agreement with one another. A resonant frequency of approximately 22 kHz, a frequency sensitivity of over 250 Hz per g, a one-hour bias stability of 55 μg, a bias repeatability (1σ) of 48 μg and the bias-instability of 4.8 μg have been achieved. View Full-Text
Keywords: resonant accelerometer; SOI; micro-lever mechanism; sensitivity; MEMS resonant accelerometer; SOI; micro-lever mechanism; sensitivity; MEMS

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Zhang, J.; Su, Y.; Shi, Q.; Qiu, A.-P. Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity. Sensors 2015, 15, 30293-30310.

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