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Open AccessCommunication
Sensors 2014, 14(10), 19507-19516;

Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Beijing 100084, China
Author to whom correspondence should be addressed.
Received: 18 August 2014 / Revised: 25 September 2014 / Accepted: 14 October 2014 / Published: 17 October 2014
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
Full-Text   |   PDF [1395 KB, uploaded 17 October 2014]


A novel multifrequency excitation (MFE) method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE) method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test repeatability and accuracy. The current test system based on LabVIEW using the SFE method was modified to use the MFE method without any hardware changes. The experimental results verified that the MFE method can be an ideal solution for large-scale dynamic testing of gyroscope chips and gyroscopes. View Full-Text
Keywords: micromachined gyroscope chip; dynamic test; multifrequency excitation micromachined gyroscope chip; dynamic test; multifrequency excitation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Deng, Y.; Zhou, B.; Xing, C.; Zhang, R. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips. Sensors 2014, 14, 19507-19516.

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