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Journal: Sensors, 2010
Volume: 10
Number: 6149

Article: Review on the Modeling of Electrostatic MEMS
Authors: by Wan-Chun Chuang, Hsin-Li Lee, Pei-Zen Chang and Yuh-Chung Hu
Link: https://www.mdpi.com/1424-8220/10/6/6149

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