Next Article in Journal
SirT1—A Sensor for Monitoring Self-Renewal and Aging Process in Retinal Stem Cells
Previous Article in Journal
An Emergency-Adaptive Routing Scheme for Wireless Sensor Networks for Building Fire Hazard Monitoring
Previous Article in Special Issue
Level Set Approach to Anisotropic Wet Etching of Silicon
Open AccessReview

Review on the Modeling of Electrostatic MEMS

1
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
2
MicroSystems Technology Center, Industrial Technology Research Institute, Taipei, Taiwan
3
Department of Mechanical and Electromechanical Engineering, Center of Green Technology, National ILan University, ILan, Taiwan
*
Author to whom correspondence should be addressed.
Sensors 2010, 10(6), 6149-6171; https://doi.org/10.3390/s100606149
Received: 9 March 2010 / Revised: 18 May 2010 / Accepted: 24 May 2010 / Published: 21 June 2010
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering - 2009)
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. View Full-Text
Keywords: electrostatics; electromechanics; MEMS; pull-in voltage electrostatics; electromechanics; MEMS; pull-in voltage
MDPI and ACS Style

Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C. Review on the Modeling of Electrostatic MEMS. Sensors 2010, 10, 6149-6171.

Show more citation formats Show less citations formats

Article Access Map

1
Only visits after 24 November 2015 are recorded.
Back to TopTop