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Journal: Molecules, 2021
Volume: 26
Number: 5621

Article: Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films
Authors: by Racim Radjef, Karyn L. Jarvis, Colin Hall, Andrew Ang, Bronwyn L. Fox and Sally L. McArthur
Link: https://www.mdpi.com/1420-3049/26/18/5621

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