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Keywords = ultrasonic particle manipulation

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14 pages, 4550 KiB  
Article
Tunable Acoustic Tweezer System for Precise Three-Dimensional Particle Manipulation
by Jiyun Nan, Hiep Xuan Cao, Jong-Oh Park, Eunpyo Choi and Byungjeon Kang
Micromachines 2024, 15(10), 1240; https://doi.org/10.3390/mi15101240 - 8 Oct 2024
Cited by 1 | Viewed by 1819
Abstract
This study introduces a tunable acoustic tweezer system designed for precise three-dimensional particle trapping and manipulation. The system utilizes a dual-liquid-layer acoustic lens, which enables the dynamic control of the focal length through the adjustable curvature of a latex membrane. This tunability is [...] Read more.
This study introduces a tunable acoustic tweezer system designed for precise three-dimensional particle trapping and manipulation. The system utilizes a dual-liquid-layer acoustic lens, which enables the dynamic control of the focal length through the adjustable curvature of a latex membrane. This tunability is essential for generating the acoustic forces necessary for effective manipulation of particles, particularly along the direction of acoustic wave propagation (z-axis). Experiments conducted with spherical particles as small as 1.5 mm in diameter demonstrated the system’s capability for stable trapping and manipulation. Performance was rigorously evaluated through both z-axis and 3D manipulation tests. In the z-axis experiments, the system achieved a manipulation range of 33.4–53.4 mm, with a root-mean-square error and standard deviation of 0.044 ± 0.045 mm, which highlights its precision. Further, the 3D manipulation experiments showed that particles could be accurately guided along complex paths, including multilayer rectangular and helical trajectories, with minimal deviation. A visual feedback-based particle navigation system significantly enhanced positional accuracy, reducing errors relative to open-loop control. These results confirm that the tunable acoustic tweezer system is a robust tool for applications requiring precise control of particles with diameter of 1.5 mm in three-dimensional environments. Considering its ability to dynamically adjust the focal point and maintain stable trapping, this system is well suited for tasks demanding high precision, such as targeted particle delivery and other applications involving advanced material manipulation. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 2nd Edition)
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14 pages, 8720 KiB  
Article
A Microchannel Device for Droplet Classification by Manipulation Using Piezoelectric Vibrator
by Ao Fujioka, Shoko Seo, Takefumi Kanda, Shuichi Wakimoto and Daisuke Yamaguchi
Actuators 2024, 13(3), 95; https://doi.org/10.3390/act13030095 - 28 Feb 2024
Cited by 1 | Viewed by 1904
Abstract
Emulsion formulations should be monodispersed in terms of their stability. Therefore, there is a need for a device that can classify droplets of the desired size from polydispersed emulsions in a fluidized bed manufacturing system. In the previous study, we evaluated the fabrication [...] Read more.
Emulsion formulations should be monodispersed in terms of their stability. Therefore, there is a need for a device that can classify droplets of the desired size from polydispersed emulsions in a fluidized bed manufacturing system. In the previous study, we evaluated the fabrication of a droplet manipulation device using acoustic radiation forces through simulation using the finite element method. In this study, particle manipulation experiments using 1, 6, and 10 µm polystyrene particles were first estimated and evaluated in comparison with their theoretical particle behavior. Based on the results we obtained, the driving conditions and droplet behavior were derived, and the droplet manipulation device using ultrasonic waves to shrink monodisperse emulsions was evaluated. As a result, the droplet classification effect in the microchannel was confirmed to be consistent with the droplet behavior prediction, and the microchannel structure with a constriction component improved its classification effect. Full article
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21 pages, 4030 KiB  
Review
Review of Ultrasonic Particle Manipulation Techniques: Applications and Research Advances
by Shuai Wang, Xuewei Wang, Fucheng You and Han Xiao
Micromachines 2023, 14(8), 1487; https://doi.org/10.3390/mi14081487 - 25 Jul 2023
Cited by 14 | Viewed by 5355
Abstract
Ultrasonic particle manipulation technique is a non-contact label-free method for manipulating micro- and nano-scale particles using ultrasound, which has obvious advantages over traditional optical, magnetic, and electrical micro-manipulation techniques; it has gained extensive attention in micro-nano manipulation in recent years. This paper introduces [...] Read more.
Ultrasonic particle manipulation technique is a non-contact label-free method for manipulating micro- and nano-scale particles using ultrasound, which has obvious advantages over traditional optical, magnetic, and electrical micro-manipulation techniques; it has gained extensive attention in micro-nano manipulation in recent years. This paper introduces the basic principles and manipulation methods of ultrasonic particle manipulation techniques, provides a detailed overview of the current mainstream acoustic field generation methods, and also highlights, in particular, the applicable scenarios for different numbers and arrangements of ultrasonic transducer devices. Ultrasonic transducer arrays have been used extensively in various particle manipulation applications, and many sound field reconstruction algorithms based on ultrasonic transducer arrays have been proposed one after another. In this paper, unlike most other previous reviews on ultrasonic particle manipulation, we analyze and summarize the current reconstruction algorithms for generating sound fields based on ultrasonic transducer arrays and compare these algorithms. Finally, we explore the applications of ultrasonic particle manipulation technology in engineering and biological fields and summarize and forecast the research progress of ultrasonic particle manipulation technology. We believe that this review will provide superior guidance for ultrasonic particle manipulation methods based on the study of micro and nano operations. Full article
(This article belongs to the Special Issue Acoustic Micro/Nano Manipulation and Its Applications)
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13 pages, 10178 KiB  
Article
Formation of a 3D Particle Array Actuated by Ultrasonic Traveling Waves in a Regular Polygon Resonator
by Fei Wan, Kai Xu, Hongcheng Wang, Haihao Xu, A’long Huang, Zihao Bai, Linan Zhang and Liqun Wu
Micromachines 2022, 13(11), 2003; https://doi.org/10.3390/mi13112003 - 17 Nov 2022
Cited by 1 | Viewed by 1882
Abstract
Acoustic radiation forces have been extensively studied regarding static particles, cell patterning, and dynamic transportation. Compared with standing wave manipulation, traveling wave manipulation can be more easily modulated in real time and has no matching requirement between the size of the resonant cavity [...] Read more.
Acoustic radiation forces have been extensively studied regarding static particles, cell patterning, and dynamic transportation. Compared with standing wave manipulation, traveling wave manipulation can be more easily modulated in real time and has no matching requirement between the size of the resonant cavity and the sound frequency. In this work, we present an efficient, multi-layer microparticle pattern technique in a 3D polygon cavity with a traveling bulk acoustic wave. There are two types of excitation modes: the interval excitation mode (IEM) and the adjacent excitation mode (AEM). We conducted theoretical and simulation analyses, and our results show that both of these modes can form particle arrays in the resonant cavity, which is in accordance with the experimental results. The array spacings in the IEM and AEM were about 0.8 mm and 1.3 mm, respectively, while the acoustic frequency was 1MHz. Double-layer particle patterns were arrayed by a double in the resonant cavity. The spacing between the two layers was set at 3.0 mm. The line spacings were about 0.4 mm in both layers. The line width was 0.2 mm, which was larger than the single layer. The results show that ultrasonic traveling waves are a feasible method to manipulate particles and cells that form 3D patterns in particle–fluid flows. Full article
(This article belongs to the Special Issue Acoustofluidics: Applications, Phenomena and Fabrication Technique)
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12 pages, 4040 KiB  
Article
Particle Manipulation in 2D Space Using a Capacitive Micromachined Ultrasonic Transducer
by Chang Hoon Lee, Beom Hoon Park, Young Hun Kim, Hyeong Geun Jo and Kwan Kyu Park
Micromachines 2022, 13(4), 534; https://doi.org/10.3390/mi13040534 - 29 Mar 2022
Cited by 1 | Viewed by 2866
Abstract
Ultrasonic particle manipulation is a noncontact method for controlling microscale objects, such as cells or microparticles, using an acoustic field. In this study, a 2D array of capacitive micromachined ultrasonic transducers (CMUTs), placed horizontally in immersion, generated ultrasonic waves in the vertical direction, [...] Read more.
Ultrasonic particle manipulation is a noncontact method for controlling microscale objects, such as cells or microparticles, using an acoustic field. In this study, a 2D array of capacitive micromachined ultrasonic transducers (CMUTs), placed horizontally in immersion, generated ultrasonic waves in the vertical direction, and the oil’s surface increased due to the radiation force of the ultrasonic waves. In addition, the radiation force directly exerted a force on a floating particle. By measuring the movement of the reflected laser light by the moving oil surface, the height of the oil’s surface deformed by the acoustic radiation force (ARF) was measured. The ARF made a floating particle, as well as the oil’s surface, move. The particle moved radially away from the surface position above the transducer, and its velocity was determined by its position on the fluid’s surface. When a single channel was operated, it moved 0.4 mm at an average speed of 90 μm/s, and when two adjacent channels were operated, it moved 1.2 mm at a speed of 272 μm/s. The particles moved in any direction on the surface of the oil by controlling the actuation channel using an electrical switch. Full article
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12 pages, 6039 KiB  
Article
Study on Particle Manipulation in a Metal Internal Channel under Acoustic Levitation
by Yaxing Wang, Liqun Wu and Yajing Wang
Micromachines 2022, 13(1), 18; https://doi.org/10.3390/mi13010018 - 24 Dec 2021
Cited by 6 | Viewed by 3173
Abstract
In order to study the acoustic levitation and manipulation of micro-particles in the heterogeneous structures inside metal, a test system for internal levitation in three-dimensional space is designed, establishing the 3D motion model of ultrasonic levitation and manipulation of micro-particles. The relationship between [...] Read more.
In order to study the acoustic levitation and manipulation of micro-particles in the heterogeneous structures inside metal, a test system for internal levitation in three-dimensional space is designed, establishing the 3D motion model of ultrasonic levitation and manipulation of micro-particles. The relationship between levitation force, particle diameter, internal channel size, and transmission thickness is established through the motion manipulation tests of multi-configuration channel levitation micro-particles in components. The results show that the proposed method can realize the following movement of levitation micro-particles at a higher speed and the control of motion accuracy in three-dimensional space. The micro-particles can be reliably suspended and continuously moved inside the components along a predesigned motion trajectory. The results provide an effective and feasible processing scheme for direct processing through the internal spatial structure. Full article
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12 pages, 3793 KiB  
Article
Evolvable Acoustic Field Generated by a Transducer with 3D-Printed Fresnel Lens
by Danfeng Wang, Pengfei Lin, Zeyu Chen, Chunlong Fei, Zhihai Qiu, Qiang Chen, Xinhao Sun, Yan Wu and Lei Sun
Micromachines 2021, 12(11), 1315; https://doi.org/10.3390/mi12111315 - 26 Oct 2021
Cited by 4 | Viewed by 3132
Abstract
Evolvable acoustic fields are considered an effective method for solving technical problems related to fields such as biological imaging, particle manipulation, drug therapy and intervention. However, because of technical difficulties and the limited technology available for realizing flexible adjustments of sound fields, few [...] Read more.
Evolvable acoustic fields are considered an effective method for solving technical problems related to fields such as biological imaging, particle manipulation, drug therapy and intervention. However, because of technical difficulties and the limited technology available for realizing flexible adjustments of sound fields, few studies have reported on this aspect in recent years. Herein, we propose a novel solution, using a Fresnel lens-focused ultrasonic transducer for generating excited-signal-dependent acoustic pressure patterns. Finite element analysis (FEA) is used to predict the performance of a transducer with a Fresnel lens. The Fresnel lens is printed using 3D additive manufacturing. Normalized intensity maps of the acoustic pressure fields are characterized from the Fresnel lens-focused transducer under various numbers of excited-signal cycles. The results demonstrate that under different cycle excitations, a temporal evolution acoustic intensity can be generated and regulated by an ultrasound transducer with a 3D Fresnel lens. This acoustical pattern control method is not only simple to realize but also has considerable application prospects. Full article
(This article belongs to the Special Issue Advances in Piezoelectric Sensors, Transducers and Harvesters)
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23 pages, 10444 KiB  
Review
Ultrasonic Particle Manipulation in Glass Capillaries: A Concise Review
by Guotian Liu, Junjun Lei, Feng Cheng, Kemin Li, Xuanrong Ji, Zhigang Huang and Zhongning Guo
Micromachines 2021, 12(8), 876; https://doi.org/10.3390/mi12080876 - 26 Jul 2021
Cited by 21 | Viewed by 13337
Abstract
Ultrasonic particle manipulation (UPM), a non-contact and label-free method that uses ultrasonic waves to manipulate micro- or nano-scale particles, has recently gained significant attention in the microfluidics community. Moreover, glass is optically transparent and has dimensional stability, distinct acoustic impedance to water and [...] Read more.
Ultrasonic particle manipulation (UPM), a non-contact and label-free method that uses ultrasonic waves to manipulate micro- or nano-scale particles, has recently gained significant attention in the microfluidics community. Moreover, glass is optically transparent and has dimensional stability, distinct acoustic impedance to water and a high acoustic quality factor, making it an excellent material for constructing chambers for ultrasonic resonators. Over the past several decades, glass capillaries are increasingly designed for a variety of UPMs, e.g., patterning, focusing, trapping and transporting of micron or submicron particles. Herein, we review established and emerging glass capillary-transducer devices, describing their underlying mechanisms of operation, with special emphasis on the application of glass capillaries with fluid channels of various cross-sections (i.e., rectangular, square and circular) on UPM. We believe that this review will provide a superior guidance for the design of glass capillary-based UPM devices for acoustic tweezers-based research. Full article
(This article belongs to the Special Issue Miniature Ultrasonic Devices and Their Applications)
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16 pages, 12537 KiB  
Review
Recent Development and Perspectives of Optimization Design Methods for Piezoelectric Ultrasonic Transducers
by Dongdong Chen, Linwei Wang, Xingjun Luo, Chunlong Fei, Di Li, Guangbao Shan and Yintang Yang
Micromachines 2021, 12(7), 779; https://doi.org/10.3390/mi12070779 - 30 Jun 2021
Cited by 30 | Viewed by 7342
Abstract
A piezoelectric ultrasonic transducer (PUT) is widely used in nondestructive testing, medical imaging, and particle manipulation, etc., and the performance of the PUT determines its functional performance and effectiveness in these applications. The optimization design method of a PUT is very important for [...] Read more.
A piezoelectric ultrasonic transducer (PUT) is widely used in nondestructive testing, medical imaging, and particle manipulation, etc., and the performance of the PUT determines its functional performance and effectiveness in these applications. The optimization design method of a PUT is very important for the fabrication of a high-performance PUT. In this paper, traditional and efficient optimization design methods for a PUT are presented. The traditional optimization design methods are mainly based on an analytical model, an equivalent circuit model, or a finite element model and the design parameters are adjusted by a trial-and-error method, which relies on the experience of experts and has a relatively low efficiency. Recently, by combining intelligent optimization algorithms, efficient optimization design methods for a PUT have been developed based on a traditional model or a data-driven model, which can effectively improve the design efficiency of a PUT and reduce its development cycle and cost. The advantages and disadvantages of the presented methods are compared and discussed. Finally, the optimization design methods for PUT are concluded, and their future perspectives are discussed. Full article
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13 pages, 6213 KiB  
Article
Generating Airborne Ultrasonic Amplitude Patterns Using an Open Hardware Phased Array
by Rafael Morales, Iñigo Ezcurdia, Josu Irisarri, Marco A. B. Andrade and Asier Marzo
Appl. Sci. 2021, 11(7), 2981; https://doi.org/10.3390/app11072981 - 26 Mar 2021
Cited by 35 | Viewed by 16814
Abstract
Holographic methods from optics can be adapted to acoustics for enabling novel applications in particle manipulation or patterning by generating dynamic custom-tailored acoustic fields. Here, we present three contributions towards making the field of acoustic holography more widespread. Firstly, we introduce an iterative [...] Read more.
Holographic methods from optics can be adapted to acoustics for enabling novel applications in particle manipulation or patterning by generating dynamic custom-tailored acoustic fields. Here, we present three contributions towards making the field of acoustic holography more widespread. Firstly, we introduce an iterative algorithm that accurately calculates the amplitudes and phases of an array of ultrasound emitters in order to create a target amplitude field in mid-air. Secondly, we use the algorithm to analyse the impact of spatial, amplitude and phase emission resolution on the resulting acoustic field, thus providing engineering insights towards array design. For example, we show an onset of diminishing returns for smaller than a quarter-wavelength sized emitters and a phase and amplitude resolution of eight and four divisions per period, respectively. Lastly, we present a hardware platform for the generation of acoustic holograms. The array is integrated in a single board composed of 256 emitters operating at 40 kHz. We hope that the results and procedures described within this paper enable researchers to build their own ultrasonic arrays and explore novel applications of ultrasonic holograms. Full article
(This article belongs to the Special Issue Holography in Acoustics and Ultrasonics)
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13 pages, 6138 KiB  
Article
Micromotor Manipulation Using Ultrasonic Active Traveling Waves
by Hiep Xuan Cao, Daewon Jung, Han-Sol Lee, Gwangjun Go, Minghui Nan, Eunpyo Choi, Chang-Sei Kim, Jong-Oh Park and Byungjeon Kang
Micromachines 2021, 12(2), 192; https://doi.org/10.3390/mi12020192 - 13 Feb 2021
Cited by 28 | Viewed by 4033
Abstract
The ability to manipulate therapeutic agents in fluids is of interest to improve the efficiency of targeted drug delivery. Ultrasonic manipulation has great potential in the field of therapeutic applications as it can trap and manipulate micro-scale objects. Recently, several methods of ultrasonic [...] Read more.
The ability to manipulate therapeutic agents in fluids is of interest to improve the efficiency of targeted drug delivery. Ultrasonic manipulation has great potential in the field of therapeutic applications as it can trap and manipulate micro-scale objects. Recently, several methods of ultrasonic manipulation have been studied through standing wave, traveling wave, and acoustic streaming. Among them, the traveling wave based ultrasonic manipulation is showing more advantage for in vivo environments. In this paper, we present a novel ultrasonic transducer (UT) array with a hemispherical arrangement that generates active traveling waves with phase modulation to manipulate a micromotor in water. The feasibility of the method could be demonstrated by in vitro and ex vivo experiments conducted using a UT array with 16 transducers operating at 1 MHz. The phase of each transducer was controlled independently for generating a twin trap and manipulation of a micromotor in 3D space. This study shows that the ultrasonic manipulation device using active traveling waves is a versatile tool that can be used for precise manipulation of a micromotor inserted in a human body and targeted for drug delivery. Full article
(This article belongs to the Special Issue Micro/Nanorobotics)
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16 pages, 32209 KiB  
Article
Inter-Particle Effects with a Large Population in Acoustofluidics
by Kun Jia, Yulong Wang, Liqiang Li, Jian Chen and Keji Yang
Actuators 2020, 9(4), 101; https://doi.org/10.3390/act9040101 - 10 Oct 2020
Cited by 2 | Viewed by 2895
Abstract
The ultrasonic manipulation of cells and bioparticles in a large population is a maturing technology. There is an unmet demand for improved theoretical understanding of the particle–particle interactions at a high concentration. In this study, a semi-analytical method combining the Jacobi–Anger expansion and [...] Read more.
The ultrasonic manipulation of cells and bioparticles in a large population is a maturing technology. There is an unmet demand for improved theoretical understanding of the particle–particle interactions at a high concentration. In this study, a semi-analytical method combining the Jacobi–Anger expansion and two-dimensional finite element solution of the scattering problem is proposed to calculate the acoustic radiation forces acting on massive compressible particles. Acoustic interactions on arrangements of up to several tens of particles are investigated. The particle radius ranges from the Rayleigh scattering limit (ka«1) to the Mie scattering region (ka≈1). The results show that the oscillatory spatial distribution of the secondary radiation force is related to the relative size of co-existing particles, not the absolute value (for particles with the same radius). In addition, the acoustic interaction is non-transmissible for a group of identical particles. For a large number of equidistant particles arranged along a line, the critical separation distance for the attraction force decreases as the number of particles increases, but eventually plateaus (for 16 particles). The range of attraction for the formed cluster is stabilized when the number of aggregated particles reaches a certain value. Full article
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17 pages, 5462 KiB  
Article
Synthesis and Characterization of Amorphous Iron Oxide Nanoparticles by the Sonochemical Method and Their Application for the Remediation of Heavy Metals from Wastewater
by Virendra Kumar Yadav, Daoud Ali, Samreen Heena Khan, Govindhan Gnanamoorthy, Nisha Choudhary, Krishna Kumar Yadav, Van Nam Thai, Seik Altaf Hussain and Salim Manhrdas
Nanomaterials 2020, 10(8), 1551; https://doi.org/10.3390/nano10081551 - 7 Aug 2020
Cited by 121 | Viewed by 9882
Abstract
Nanoparticles have gained huge attention in the last decade due to their applications in electronics, medicine, and environmental clean-up. Iron oxide nanoparticles (IONPs) are widely used for the wastewater treatment due to their recyclable nature and easy manipulation by an external magnetic field. [...] Read more.
Nanoparticles have gained huge attention in the last decade due to their applications in electronics, medicine, and environmental clean-up. Iron oxide nanoparticles (IONPs) are widely used for the wastewater treatment due to their recyclable nature and easy manipulation by an external magnetic field. Here, in the present research work, iron oxide nanoparticles were synthesized by the sonochemical method by using precursors of ferrous sulfate and ferric chloride at 70 °C for one hour in an ultrasonicator. The synthesized iron oxide nanoparticles were characterized by diffraction light scattering (DLS), Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, X-ray diffraction (XRD), field-emission scanning electron microscopy (FESEM), electron diffraction spectroscopy (EDS), high-resolution transmission electron microscopy (HRTEM) and vibrating sample magnetometer (VSM). The FTIR analysis exhibits characteristic absorption bands of IONPs at 400–800 cm−1, while the Raman spectra showed three characteristic bands at 273, 675, and 1379 cm−1 for the synthesized IONPs. The XRD data revealed three major intensity peaks at two theta, 33°, 35°, and 64° which indicated the presence of maghemite and magnetite phase. The size of the spherical shaped IONPs was varying from 9–70 nm with an average size of 38.9 nm while the size of cuboidal shaped particle size was in microns. The purity of the synthesized IONPs was confirmed by the EDS attached to the FESEM, which clearly show sharp peaks for Fe and O, while the magnetic behavior of the IONPs was confirmed by the VSM measurement and the magnetization was 2.43 emu/g. The batch adsorption study of lead (Pb) and chromium (Cr) from 20% fly ash aqueous solutions was carried out by using 0.6 mg/100 mL IONPs, which exhibited maximum removal efficiency i.e., 97.96% and 82.8% for Pb2+ and Cr ions, respectively. The fly ash are being used in making cements, tiles, bricks, bio fertilizers etc., where the presence of fly ash is undesired property which has to be either removed or will be brought up to the value of acceptable level in the fly ash. Therefore, the synthesized IONPs, can be applied in the elimination of heavy metals and other undesired elements from fly ash with a short period of time. Moreover, the IONPs that have been used as a nanoadsorbent can be recovered from the reaction mixture by applying an external magnetic field that can be recycled and reused. Therefore, this study can be effective in all the fly ash-based industries for elimination of the undesired elements, while recyclability and reusable nature of IONPs will make the whole adsorption or elimination process much economical. Full article
(This article belongs to the Special Issue Nanomaterials and Nanotechnology in Wastewater Treatment)
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20 pages, 13062 KiB  
Article
Diversity of 2D Acoustofluidic Fields in an Ultrasonic Cavity Generated by Multiple Vibration Sources
by Qiang Tang, Song Zhou, Liang Huang and Zhong Chen
Micromachines 2019, 10(12), 803; https://doi.org/10.3390/mi10120803 - 22 Nov 2019
Cited by 8 | Viewed by 4410
Abstract
Two-dimensional acoustofluidic fields in an ultrasonic chamber actuated by segmented ring-shaped vibration sources with different excitation phases are simulated by COMSOL Multiphysics. Diverse acoustic streaming patterns, including aggregation and rotational modes, can be feasibly generated by the excitation of several sessile ultrasonic sources [...] Read more.
Two-dimensional acoustofluidic fields in an ultrasonic chamber actuated by segmented ring-shaped vibration sources with different excitation phases are simulated by COMSOL Multiphysics. Diverse acoustic streaming patterns, including aggregation and rotational modes, can be feasibly generated by the excitation of several sessile ultrasonic sources which only vibrate along radial direction. Numerical simulation of particle trajectory driven by acoustic radiation force and streaming-induced drag force also demonstrates that micro-scale particles suspended in the acoustofluidic chamber can be trapped in the velocity potential well of fluid flow or can rotate around the cavity center with the circumferential acoustic streaming field. Preliminary investigation of simple Russian doll- or Matryoshka-type configurations (double-layer vibration sources) provide a novel method of multifarious structure design in future researches on the combination of phononic crystals and acoustic streaming fields. The implementation of multiple segmented ring-shaped vibration sources offers flexibility for the control of acoustic streaming fields in microfluidic devices for various applications. We believe that this kind of acoustofluidic design is expected to be a promising tool for the investigation of rapid microfluidic mixing on a chip and contactless rotational manipulation of biosamples, such as cells or nematodes. Full article
(This article belongs to the Special Issue Acoustofluidics)
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12 pages, 2933 KiB  
Article
Nanomechanical and Material Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis: Effects of F-Doping
by Le Thi Cam Tuyen, Sheng-Rui Jian, Nguyen Thanh Tien and Phuoc Huu Le
Materials 2019, 12(10), 1665; https://doi.org/10.3390/ma12101665 - 22 May 2019
Cited by 48 | Viewed by 5974
Abstract
Fluorine-doped tin oxide (FTO) thin films were deposited on glass substrates using ultrasonic spray pyrolysis (USP) at a fixed substrate temperature of 400 °C and various Fluorine/Tin (F/Sn) atomic ratios of 0, 0.1, 0.5, and 1.0. Effects of F/Sn atomic ratios on structural-morphological, [...] Read more.
Fluorine-doped tin oxide (FTO) thin films were deposited on glass substrates using ultrasonic spray pyrolysis (USP) at a fixed substrate temperature of 400 °C and various Fluorine/Tin (F/Sn) atomic ratios of 0, 0.1, 0.5, and 1.0. Effects of F/Sn atomic ratios on structural-morphological, compositional, electrical, optical, and nanomechanical properties of the FTO thin films were systematically studied. The FTO films exhibited a tetragonal structure with preferred orientations of (110), (200), and (211), and polycrystalline morphology with spear-like or coconut shell-like particles on the surfaces. The presence of F-doping was confirmed by XPS results with clear F1s peaks, and F-concentration was determined to be 0.7% for F/Sn = 0.1 and 5.1% for F/Sn = 0.5. Moreover, the resistivity of FTO films reduced remarkably from 4.1 mΩcm at F/Sn = 0 to 0.7 mΩcm at F/Sn = 1, primarily due to the corresponding increase of carrier concentration from 2 × 1020 cm−3 to 1.2 × 1021 cm−3. The average optical transmittance of the films prepared at F/Sn of 0–0.5 was over 90%, and it decreased to 84.4% for the film prepared at F/Sn = 1. The hardness (H) and Young’s modulus (E) of the FTO films increased when the F/Sn ratios increased from 0 to 0.5, reaching maximum values of H = 12.3 ± 0.4 GPa, E = 131.7 ± 8.0 GPa at F/Sn = 0.5. Meanwhile, the H and E reduced considerably when the F/Sn ratio further increased to 1.0, following the inverse Hall-Petch effect approximately, suggesting that the grain boundary effect played a primary role in manipulating the nanomechanical properties of the FTO films. Furthermore, favorable mechanical properties with large H/Ef and H 3 / E f 2 ratios were found for the FTO film prepared at F/Sn = 0.5, which possessed high crystallinity, large grain size, and compact morphology. Full article
(This article belongs to the Special Issue Deformation and Fracture of Thin Films and Nanostructured Materials)
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