Search Results (64)

Tantalum nitride (TaN) coatings are valued for their hardness, chemical inertness, and biocompatibility; however, they lack intrinsic antibacterial properties, which limits their application in biomedical environments. Introducing copper (Cu) into the TaN matrix offers a potential solution by combining TaN’s mechanical and chemical durability with Cu’s well-documented antimicrobial action. This study explores how varying copper incorporation affects the structural, electrical, photocatalytic, and antibacterial characteristics of TaCuN multilayer films synthesized via reactive magnetron sputtering. Three thin TaCuN films were fabricated using a high-power reactive magnetron co-sputtering system, varying the Cu target power to control the composition. Structural and morphological analysis was performed using X-ray diffraction (XRD), scanning/transmission electron microscopy (STEM/TEM), and energy-dispersive X-ray spectroscopy (EDS). Electrical conductivity was studied along and across the film surfaces at temperatures ranging from 20 to 375 K using AC impedance spectroscopy. Optical and photocatalytic properties were assessed using UV–Vis spectroscopy and methylene blue degradation tests. Antibacterial activity against Staphylococcus aureus was analyzed under visible light using CFU reduction tests. XRD and TEM analyses revealed a multilayered four-zone architecture with alternating Ta-, Cu-, and N-rich phases and a dominant cubic δ-TaN pattern. The layers exhibited pronounced conductivity anisotropy, with in-plane conductivity (~10³ Ω⁻¹ cm⁻¹) exceeding cross-plane conductivity by ~10⁷ times, attributed to the formation of a metallic conduction channel in the mid-layer. Optical spectra indicated limited light absorption above 300 nm and negligible photocatalytic activity. Increasing the Cu content substantially enhanced antibacterial efficiency, with the highest-Cu sample achieving 95.6 % bacterial growth reduction. Morphological evaluation indicated that smooth film surfaces (Ra < 0.2 μm) effectively minimized bacterial adhesion. Reactive magnetron sputtering enables the precise engineering of TaCuN multilayers, combining high electrical anisotropy with robust antibacterial functionality. The optimized TaCuN coating offers promising potential in biomedical and protective applications where both conductivity and microbial resistance are required. Full article

Reactive co-sputtering was applied to deposit TaN-(Ag,Cu) nanocomposite films on Si and tool steels. Prior to post-deposition annealing, the films were deposited with TaN cap (diffusion barrier) layers in various thicknesses in order to slow down the nucleation and growth of emerging Ag and Cu particles. The thickness of the cap layers was set at 5, 10, 20, or 50 nm. The films were then annealed using Rapid Thermal Annealing (RTA) at 400 °C to induce the nucleation and growth of Ag and Cu nanoparticles. These films’ surface morphologies and structures were examined. The samples were tested for their anti-wear and antibacterial behaviors against Gram-positive S. aureus and Gram-negative E. coli, with a variation in cap layer thickness. It is found that, through the application of TaN cap layers, the out-diffusion of Ag and Cu atoms may be slowed down. The surface concentrations of Ag and Cu might decrease from 35 at.% and 17 at.% to 18 at.% and 6 at.%, respectively, when the cap layer thickness increases to 50 nm (after being annealed for 12 min). The diffusion mechanism is proposed to explain the formation of nanoparticles on the surface through boundary diffusion. Antibacterial behaviors against both bacteria, as well as tribological properties, could still be effective but become less significant with an increase in the cap layer thickness. The antibacterial efficiency after 3 h testing decreased from 99% to 5% and 8% against E. coli and S. aureus, respectively. At 12 h, all the samples reached >99% antibacterial efficiency, despite the variation in cap thickness. For sliding wear, the wear rate was doubled when the cap thickness increased to 50 nm (when the normal load was 1 N). On the other hand, the difference was minor when the normal load was changed to 5 N. The sliding lifetime of the samples was studied using a tribometer. The total lifetime may increase with an increase in the cap thickness. The wear is found to be due to the oxidation of Ag and Cu nanoparticles, which results in the loss of low coefficient behaviors. Full article

This study examines the effect of oxygen concentration and sputtering power on the surface morphology of TiO₂ thin films deposited by DC reactive magnetron sputtering. Surface roughness parameters were obtained using MountainsMap^® software(10.2) from SEM images, while fractal dimensions and texture descriptors were extracted via Python-based image processing. Fractal dimension was calculated using the box-counting method applied to binarized images with multiple threshold levels, and texture analysis employed Gray-Level Co-occurrence Matrix (GLCM) statistics to capture local anisotropies and spatial heterogeneity. Four samples were analyzed, previously prepared with oxygen concentrations of 50% and 75%, and sputtering powers of 500 W and 1000 W. The results have shown that films deposited at higher oxygen levels and sputtering powers exhibited increased roughness, higher fractal dimensions, and stronger GLCM contrast, indicating more complex and heterogeneous surface structures. Conversely, films produced at lower oxygen and power settings showed smoother, more isotropic surfaces with lower complexity. This integrated analysis framework links deposition parameters with morphological characteristics, enhancing the understanding of surface evolution and enabling better control of TiO₂ thin film properties. Full article

Titanium nitride (TiN) is a widely used industrial hard coating material, known for its excellent hardness and chemical stability. However, its relatively high coefficient of friction (COF) often leads to interfacial heat accumulation and adhesive wear during service, limiting its applicability in high-temperature tribological environments. To enhance its tribological performance, a TiN–WS₂ soft–hard composite coating was fabricated on cemented carbide substrates using reactive co-sputtering magnetron deposition. By adjusting the sputtering parameters and target power ratio, a synergistic deposition of the hard (TiN) and lubricating (WS₂) phases was achieved and compared with a pure TiN coating. The results revealed that the incorporation of WS₂ significantly reduced the COF at both room temperature (25 °C) and an elevated temperature (200 °C), with the average values decreasing from 0.61 to 0.39 at 25 °C and from 0.53 to 0.36 at 200 °C. A white light interferometry analysis showed that the TiN–WS₂ coating exhibited narrower wear tracks and less surface damage than TiN at elevated temperatures, demonstrating superior friction-reducing and wear-resistant capabilities. In terms of mechanical properties, the composite coating showed a reduction in the hardness, the reduced elastic modulus (Er), and the adhesion strength by 27.3%, 19.8%, and 9.5%, respectively, compared to pure TiN. These findings indicate that the introduction of a quantitatively controlled lubricating WS₂ phase allows for a balance between nanoscale hardness and wear resistance, offering promising potential for engineering applications under complex working conditions. Full article

To address modern tribological challenges—reducing friction and wear to conserve resources while minimising environmental impact—cobalt-doped DLC (Co-DLC) coatings were developed. These nanometric multilayer coatings, designed to retain key properties such as hardness, reduced modulus, and substrate adhesion, were fabricated using non-reactive DC magnetron sputtering (DCMS). The multilayer structure was achieved by controlling the planetary substrate holder’s rotational speed. Characterisation of microscopic, chemical, structural, and mechanical properties was performed using techniques including FEI-SEM, EDS, XRD, TEM, Raman spectroscopy, scratch adhesion testing, and nanoindentation. Tribological performance was evaluated under boundary and fully flooded lubrication using PAO4 base oil and formulations with ashless, sulphur-free AW and EP additives. The coatings exhibited a granular surface morphology, columnar cross-sections, and amorphous structure. Increased dopant concentrations slightly enhanced graphitisation and significantly improved adhesion, though hardness and reduced modulus decreased. Tribological testing revealed superlubricity in several coating–oil combinations and significantly reduced wear rates with higher dopant levels and new additives. A phosphate ester additive without an amine group achieved the lowest COF values, while one with an amine group yielded minimal wear rates. These findings highlight the potential of Co-DLC coatings and tailored additives to minimise friction and wear effectively. Full article

The knowledge of Li diffusivities in electrode materials of Li-ion batteries (LIBs) is essential for a fundamental understanding of charging/discharging times, maximum capacities, stress formation and possible side reactions. The literature indicates that Li diffusion in the cathode material Li(Ni,Mn,Co)O₂ strongly increases during electrochemical delithiation. Such an increased Li diffusivity will be advantageous for performance if it is present already in the initial state after synthesis. In order to understand the influence of a varying initial Li content on Li diffusion, we performed Li tracer diffusion experiments on Li_xCoO₂ (LCO) and Li_xNi_1/3Mn_1/3Co_1/3O₂ (NMC, x = 1, 0.9, 0.65) cathode materials. The measurements were performed on polycrystalline sintered bulk materials, free of additives and binders, in order to study the intrinsic properties. The variation of Li content was achieved using reactive solid-state synthesis using pressed Li₂CO₃, NiO, Co₃O₄ and/or MnO₂ powders and high temperature sintering at 800 °C. XRD analyses showed that the resultant bulk samples exhibit the layered LCO or NMC phases with a low amount of cation intermixing. Moreover, the presence of additional NiO and Co₃O₄ phases was detected in NMC with a pronounced nominal Li deficiency of x = 0.65. As a tracer source, a ⁶Li tracer layer with the same chemical composition was deposited using ion beam sputtering. Secondary ion mass spectrometry in depth profile mode was used for isotopic analysis. The diffusivities followed the Arrhenius law with an activation enthalpy of about 0.8 eV and were nearly identical within error for all samples investigated in the temperature range up to 500 °C. For a diffusion mechanism based on structural Li vacancies, the results indicated that varying the Li content does not result in a change in the vacancy concentration. Consequently, the design and use of a cathode initially made of a Li-deficient material will not improve the kinetics of battery performance. The possible reasons for this unexpected result are discussed. Full article

The incorporation of Ag nanoparticles onto BiVO₄ (a known H₂O oxidising photocatalyst) through magnetron sputtering to form a composite was studied. ICP-OES results showed that the loading of Ag on BiVO₄ was below 1% in all cases. UV-Vis DRS and CO₂-TPD analyses demonstrated that upon incorporation of Ag onto BiVO₄, an increase in the extent of visible light absorption and CO₂ adsorption was seen. TEM imaging showed the presence of Ag particles on the surface of larger BiVO₄ particles, while XRD analysis provided evidence for some doping of Ag into BiVO₄ lattices. The effect of the composite formation on the activity of the materials in the artificial photosynthesis reaction was significant. BiVO₄ alone produces negligible amounts of gaseous products. However, the Ag-sputtered composites produce both CO and CH₄, with a higher loading of Ag leading to higher levels of product formation. This reactivity is ascribed to the generation of a heterojunction in the composite material. It is suggested that the generation of holes in BiVO₄ following photon absorption is used to provide protons (from H₂O oxidation), and the decay of an SPR response on the Ag NPs provides hot electrons, which together with the protons reduce CO₂ to produce CH₄, CO, and adsorbed hydrocarbonaceous species. Full article

In recent years, there have been important developments in the refractory metal nitride coatings used for versatile applications, such as MoN, TaN, NbN, etc. Engineered approaches, including the deposition method, microstructure control, structural design, and the addition of functional elements, are put into practice for the promotion of coating characteristics. This study focuses on the microstructure and mechanical properties of ternary molybdenum tantalum nitride, MoTaN, coatings. MoTaN was deposited using a reactive radio frequency (r.f.) magnetron co-sputtering system with Mo/Ta target input power modulation control. The effects of composition and microstructure variations on its mechanical properties, including its hardness, elastic modulus, and wear behavior, were investigated. In general, the MoTaN coatings exhibited a columnar polycrystalline microstructure with MoN(111), Mo₂N(111), Mo₂N(200), TaN(200), and TaN(220) phases and orientations based on X-ray diffraction analysis. The addition of Ta triggered the transition of the primary orientation of Mo₂N(111) into Mo₂N(200). Transmission electron microscopy was utilized to analyze the transformation of the multiphase structure and changes in the grain size in terms of the Ta addition. According to nanoindentation and wear resistance analyses, superior hardness, elastic modulus, H/E, H³/E², and wear-resistance values were identified for the MoTaN coatings with 6.8 to 10.4 at.% Ta, and a maximum hardness of 18.0 GPa was found for the MoTaN coating deposited at an input power of Mo/Ta = 150/100 W/W. An optimized hardness of 18.0 GPa and an elastic modulus of 220.7 GPa were obtained. The adjustment of the input power during deposition played a critical role in determining the overall performance of the MoTaN co-sputtering coatings. The MoTaN coating with optimized mechanical properties is attributed to its multiphase microstructure and fine columnar grain size of less than 30 nm. Full article

Thin films of silver-doped zinc oxide (SZO) were deposited at room temperature using a DC reactive magnetron co-sputtering technique using two independent Zn and Ag targets. The crystallographic structure, chemical composition and surface morphology of SZO films with different silver concentrations were correlated with the photocatalytic (PC) properties. The crystallization of the SZO films was made using millisecond range flash-lamp-annealing (FLA) treatments. FLA induces significant structural ordering of the wurtzite structure and an in-depth redistribution of silver, resulting in the formation of silver agglomerates. The wurtzite ZnO structure is observed for silver contents below 10 at.% where Ag is partially incorporated into the oxide matrix, inducing a decrease in the optical band-gap. Regardless of the silver content, all the as-grown SZO films do not exhibit any significant PC activity. The best PC response is achieved for samples with a relatively low Ag content (2–5 at.%) after FLA treatment. The enhanced PC activity of SZO upon FLA can be attributed to structural ordering and the effective band-gap narrowing through the combination of silver doping and the plasmonic effect caused by the formation of Ag clusters. Full article

Cobalt-doped lead ferrite (Pb₂Fe₂O₅) thin films were deposited by reactive magnetron sputtering. The influence of the cobalt concentration and synthesis temperature on the structure, phase composition and ferroelectric properties of Pb₂Fe₂O₅ thin films was investigated. It was determined that the increase in deposition temperature increased the grain size and density of the Co-doped PFO thin films. The XRD data demonstrated that the Co-doped Pb₂Fe₂O₅ thin films consisted of Pb₂Fe₂O₅ and PbO phases with a low amount of CoO and Co₃O₄ phases. The increase in the cobalt concentration in the Pb₂Fe₂O₅ films slightly enhanced the cobalt oxide phase content. Polarization dependence on electric field measurement demonstrated that the highest ferroelectric properties of the Co-doped Pb₂Fe₂O₅ films were obtained when the synthesis was performed at 550 °C temperatures. The increase in the cobalt concentration in the films enhanced the remnant polarization and coercive field values. It was found that the Co-doped Pb₂Fe₂O₅ film deposited at 550 °C temperature and containing 10% cobalt had the highest remnant polarization (72 µC/cm²) and coercive electric field (105 kV/cm). Full article

p-type Ag-N dual acceptor doped ZnO thin films with long electrical stability were deposited by DC magnetron reactive co-sputtering technique. After deposition, the films were annealed at 400 °C for one hour in a nitrogen-controlled atmosphere. The deposited films were amorphous. However, after annealing, they crystallize in the typical hexagonal wurtzite structure of ZnO. The Ag-N dual acceptors were incorporated substitutionally in the structure of zinc oxide, and achieving that; the three samples presented the p-type conductivity in the ZnO. Initial electrical properties showed a low resistivity of from 1 to 10⁻³ Ω·cm, Hall mobility of tens cm²/V·s, and a hole concentration from 10¹⁷ to 10¹⁹ cm⁻³. The electrical stability analysis reveals that the p-type conductivity of the ZnO:Ag,N films is very stable and does not revert to n-type, even after 36 months of aging. These results reveal the feasibility of using these films for applications in short-wavelength or transparent optoelectronic devices. Full article

This research reports the development of 3D carbon nanostructures that can provide unique capabilities for manufacturing carbon nanotube (CNT) electronic components, electrochemical probes, biosensors, and tissue scaffolds. The shaped CNT arrays were grown on patterned catalytic substrate by chemical vapor deposition (CVD) method. The new fabrication process for catalyst patterning based on combination of nanoimprint lithography (NIL), magnetron sputtering, and reactive etching techniques was studied. The optimal process parameters for each technique were evaluated. The catalyst was made by deposition of Fe and Co nanoparticles over an alumina support layer on a Si/SiO₂ substrate. The metal particles were deposited using direct current (DC) magnetron sputtering technique, with a particle ranging from 6 nm to 12 nm and density from 70 to 1000 particles/micron. The Alumina layer was deposited by radio frequency (RF) and reactive pulsed DC sputtering, and the effect of sputtering parameters on surface roughness was studied. The pattern was developed by thermal NIL using Si master-molds with PMMA and NRX1025 polymers as thermal resists. Catalyst patterns of lines, dots, and holes ranging from 70 nm to 500 nm were produced and characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Vertically aligned CNTs were successfully grown on patterned catalyst and their quality was evaluated by SEM and micro-Raman. The results confirm that the new fabrication process has the ability to control the size and shape of CNT arrays with superior quality. Full article

Yttrium-doped barium zirconate is a commonly used electrolyte material for Protonic Ceramic Fuel Cells (PCFC) due to its high protonic conductivity and high chemical stability. However, it is also known for its poor sinterability and poor grain boundary conductivity. In this work, in response to these issues, reactive magnetron sputtering was strategically chosen as the electrolyte deposition technique. This method allows the creation of a 4 µm tick electrolyte with a dense columnar microstructure. Notably, this technique is not widely utilized in PCFC fabrication. In this study, a complete cell is elaborated without exceeding a sintering temperature of 1350 °C. Tape casting is used for the anode, and spray coating is used for the cathode. The material of interest is yttrium-doped barium zirconate with the formula BaZr_0.8Y_0.2O_3−δ (BZY). The anode consists of a NiO-BZY cermet, while the cathode is composed of BZY and Ba_0.5Sr_0.5Co_0.8Fe_0.2O_3−δ (BSFC) in a 50:50 weight ratio. The electrochemical impedance spectroscopy analysis reveals a global polarization resistance of 0.3 Ω cm², indicating highly efficient interfaces between electrolytes and electrodes. Full article

The cubic zirconia (ZrO₂) is attractive for a broad range of applications. However, at room temperature, the cubic phase needs to be stabilized. The most studied stabilization method is the addition of the oxides of trivalent metals, such as Sc₂O₃. Another method is the stabilization of the cubic phase in nanostructures—nanopowders or nanocrystallites of pure zirconia. We studied the relationship between the size factor and the dopant concentration range for the formation and stabilization of the cubic phase in scandium-stabilized zirconia (ScSZ) films. The thin films of (ZrO₂)_1−x(Sc₂O₃)_x, with x from 0 to 0.2, were deposited on room-temperature substrates by reactive direct current magnetron co-sputtering. The crystal structure of films with an average crystallite size of 85 Å was cubic at Sc₂O₃ content from 6.5 to 17.5 mol%, which is much broader than the range of 8–12 mol.% of the conventional deposition methods. The sputtering of ScSZ films on hot substrates resulted in a doubling of crystallite size and a decrease in the cubic phase range to 7.4–11 mol% of Sc₂O₃ content. This confirmed that the size of crystallites is one of the determining factors for expanding the concentration range for forming and stabilizing the cubic phase of ScSZ films. Full article

In this study, ZrBSiTa and (ZrBSiTa)N_x films were deposited on silicon wafers through direct current magnetron cosputtering. The nitrogen flow ratio (R_N2) of the reactive gas and the sputter power applied to the Si target (P_Si) were the variables in the fabricating processes. The influence of the N and Si contents on the mechanical properties, thermal stability, and oxidation behavior of the ZrBSiTa and (ZrBSiTa)N_x films were investigated. All the as-fabricated films exhibited amorphous structures. The R_N2 set at 0.1, 0.2, and 0.4 caused the ZrBSiTaN_x films to exhibit high N contents of 52–55, 62–64, and 63–64 at.%, respectively. The Si content of the ZrBSiTa films increased from 0 to 42 at.% as P_Si increased from 0 to 150 W, and this was accompanied by decreases in hardness and Young’s modulus values from 19.1 to 14.3 GPa and 264 to 242 GPa, respectively. In contrast, the increase in Si content of the (ZrBSiTa)N_x films from 0 to 21 at.% increased the hardness from 11.5 to 14.0 GPa, and Young’s modulus from 207 to 218 GPa. Amorphous BN and SiN_x phases in the (ZrBSiTa)N_x films varied the structural and mechanical properties. The thermal stability of the (ZrBSiTa)N_x films was evaluated by annealing at 800–900 °C for 10–30 min in Ar. The oxidation behavior of the (ZrBSiTa)N_x films was evaluated in the ambient air at 800 °C for 0.5–24 h. The amorphous (ZrBSiTa)N_x films with a high Si content had high thermal stability and oxidation resistance. Full article