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Keywords = nano-scale SiOx

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16 pages, 7273 KiB  
Article
Optical and Morphological Characterization of Nanoscale Oxides Grown in Low-Energy H+-Implanted c-Silicon
by Anna Szekeres, Sashka Alexandrova, Mihai Anastasescu, Hermine Stroescu, Mariuca Gartner and Peter Petrik
Micro 2024, 4(3), 426-441; https://doi.org/10.3390/micro4030027 - 18 Jul 2024
Viewed by 1427
Abstract
Nanoscale oxides grown in c-silicon, implanted with low-energy (2 keV) H+ ions and fluences ranging from 1013 cm−2 to 1015 cm−2 by RF plasma immersion implantation (PII), have been investigated. The oxidation of the implanted Si layers proceeded [...] Read more.
Nanoscale oxides grown in c-silicon, implanted with low-energy (2 keV) H+ ions and fluences ranging from 1013 cm−2 to 1015 cm−2 by RF plasma immersion implantation (PII), have been investigated. The oxidation of the implanted Si layers proceeded in dry O2 at temperatures of 700 °C, 750 °C and 800 °C. The optical characterization of the formed Si/SiOx structures was conducted by electroreflectance (ER) and spectroscopic ellipsometric (SE) measurements. From the ER and SE spectra analysis, the characteristic energy bands of direct electron transitions in Si are elaborated. The stress in dependence on hydrogenation conditions is considered and related to the energy shifts of the Si interband transitions around 3.4 eV. Silicon oxides, grown on PII Si at a low H+ fluence, have a non-stoichiometric nature, as revealed by IR-SE spectra analysis, while with an increasing H+ fluence in the PII Si substrates and/or the subsequent oxidation temperature the stoichiometric Si-O4 units in the oxides become predominant. The development of surface morphology is studied by atomic force microscopy (AFM) imaging. Oxidation of the H+-implanted Si surface region flattens out the surface pits created on the Si surface by H+ implants. Based on the evaluation of the texture index and mean fractal dimension, the isotropic and self-similar character of the studied surfaces is emphasized. Full article
(This article belongs to the Special Issue Advances in Micro- and Nanomaterials: Synthesis and Applications)
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10 pages, 3006 KiB  
Article
Versatility Investigation of Grown Titanium Dioxide Nanoparticles and Their Comparative Charge Storage for Memristor Devices
by Shubhro Chakrabartty, Abdulkarem H. M. Almawgani, Sachin Kumar, Mayank Kumar, Suvojit Acharjee, Alaaddin Al-Shidaifat, Alwin Poulose and Turki Alsuwian
Micromachines 2023, 14(8), 1616; https://doi.org/10.3390/mi14081616 - 16 Aug 2023
Viewed by 1925
Abstract
Memristive devices have garnered significant attention in the field of electronics over the past few decades. The reason behind this immense interest lies in the ubiquitous nature of memristive dynamics within nanoscale devices, offering the potential for revolutionary applications. These applications span from [...] Read more.
Memristive devices have garnered significant attention in the field of electronics over the past few decades. The reason behind this immense interest lies in the ubiquitous nature of memristive dynamics within nanoscale devices, offering the potential for revolutionary applications. These applications span from energy-efficient memories to the development of physical neural networks and neuromorphic computing platforms. In this research article, the angle toppling technique (ATT) was employed to fabricate titanium dioxide (TiO2) nanoparticles with an estimated size of around 10 nm. The nanoparticles were deposited onto a 50 nm SiOx thin film (TF), which was situated on an n-type Si substrate. Subsequently, the samples underwent annealing processes at temperatures of 550 °C and 950 °C. The structural studies of the sample were done by field emission gun-scanning electron microscope (FEG-SEM) (JEOL, JSM-7600F). The as-fabricated sample exhibited noticeable clusters of nanoparticles, which were less prominent in the samples annealed at 550 °C and 950 °C. The element composition revealed the presence of titanium (Ti), oxygen (O2), and silicon (Si) from the substrate within the samples. X-ray diffraction (XRD) analysis revealed that the as-fabricated sample predominantly consisted of the rutile phase. The comparative studies of charge storage and endurance measurements of as-deposited, 550 °C, and 950 °C annealed devices were carried out, where as-grown device showed promising responses towards brain computing applications. Furthermore, the teaching–learning-based optimization (TLBO) technique was used to conduct further comparisons of results. Full article
(This article belongs to the Special Issue Advanced Technologies in Memristor Devices)
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11 pages, 1637 KiB  
Article
Influence of Nanoscale Intimacy in Bi-Functional Catalysts for CO2-Assisted Dehydrogenation of C5-Paraffins
by Muhammad Numan, Gayoung Lee, Eunji Eom, Jae Won Shin, Dae-Heung Choi and Changbum Jo
Catalysts 2023, 13(6), 933; https://doi.org/10.3390/catal13060933 - 25 May 2023
Cited by 2 | Viewed by 2051
Abstract
In this study, Pt1Sn1 intermetallic nanoparticles (NPs) on SiO2/CeO2@SiO2 composites were located either on SiO2 or on CeO2@SiO2, thereby varying the average distance (intimacy) between metal sites and CeOx [...] Read more.
In this study, Pt1Sn1 intermetallic nanoparticles (NPs) on SiO2/CeO2@SiO2 composites were located either on SiO2 or on CeO2@SiO2, thereby varying the average distance (intimacy) between metal sites and CeOx sites from “closest” to “nanoscale”. The catalytic performance of these catalysts was compared to dual-bed mixtures of Pt1Sn1@SiO2 and CeO2@SiO2 powders, which provided a “milliscale” distance between sites. Several beneficial effects on the catalytic performance of CO2-assisted oxidative dehydrogenation of C5-paraffins were observed when Pt1Sn1 nanoparticles were located on SiO2 in nanoscale proximity to the CeO2 sites, as opposed to Pt and Sn species located on CeO2@SiO2 with the closest proximity and milliscale intimacy between Pt1Sn1 and CeO2. The former catalysts exhibited the highest C5-paraffin conversion of 32.8%, with a C5 total olefin selectivity of 68.7%, while the closest-proximity sample had a lower conversion of 17.4%, with a C5 total olefin selectivity of 20.9%. The FT-IR (Fourier transform infrared spectroscopy) spectroscopic study of the CO adsorption and X-ray photoelectron spectroscopy results revealed that the closest proximity between Pt and Ce inhibited PtSn alloy formation due to their strong interaction. However, for the nanoscale-proximity sample, neighboring CeO2@SiO2 did not disturb Pt1Sn1 intermetallic formation. This strategy can be applied to other CO2 activation catalysts, instead of CeO2@SiO2. This paper aims to provide insights into the influence of metal–CeOx intimacy in bi-functional catalysts. Full article
(This article belongs to the Special Issue Design and Synthesis of Nanostructured Catalysts)
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11 pages, 5033 KiB  
Article
Laser Textured Superhydrophobic SiC Ceramic Surface and the Performance of Condensation Heat Transfer
by Deyuan Lou, Gengxin Lu, Heng Li, Pengjian Chen, Qing Tao, Qibiao Yang and Dun Liu
Crystals 2023, 13(5), 840; https://doi.org/10.3390/cryst13050840 - 19 May 2023
Cited by 1 | Viewed by 2237
Abstract
Chemical modification is usually utilized for preparing superhydrophobic SiC surfaces, which has the problems of long processing time, high environmental contamination risk, and high cost. To enhance the condensation heat transfer efficiency of SiC, the superhydrophobic SiC surface was fabricated through laser texturing [...] Read more.
Chemical modification is usually utilized for preparing superhydrophobic SiC surfaces, which has the problems of long processing time, high environmental contamination risk, and high cost. To enhance the condensation heat transfer efficiency of SiC, the superhydrophobic SiC surface was fabricated through laser texturing and heat treatment. In this study, the SiC surface was processed by laser texturing with a nanosecond laser, followed by heat treatment. Surface microstructures and compositions were investigated with SEM and XPS, and the heat transfer coefficient of the superhydrophobic SiC surface was tested. The results indicated that the laser-textured SiC surface had a super hydrophilic contact angle of 0°; after heat treatment, SiC ceramic became superhydrophobic (surface contact angle reaches 164°) because organic contamination on the original SiC surface could be cleaned by using laser texturing, which caused a chemical reaction and the formation of SiO2 on the surface. Moreover, the distribution of relatively low-energy SiOX was formed after heat treatment; then, SiC ceramic became superhydrophobic. Due to the formation of nanoscale sheet-like protrusion structures by heat treatment, the SiC superhydrophobic surface exhibited typical dropwise condensation, and the condensation heat transfer coefficient reached 331.8 W/(m2·K), which was 2.3 times higher than that of the original surface. Full article
(This article belongs to the Special Issue Recent Developments of Inorganic Crystalline Materials)
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29 pages, 6702 KiB  
Review
Tunnel Oxide Deposition Techniques and Their Parametric Influence on Nano-Scaled SiOx Layer of TOPCon Solar Cell: A Review
by Hasnain Yousuf, Muhammad Quddamah Khokhar, Muhammad Aleem Zahid, Matheus Rabelo, Sungheon Kim, Duy Phong Pham, Youngkuk Kim and Junsin Yi
Energies 2022, 15(15), 5753; https://doi.org/10.3390/en15155753 - 8 Aug 2022
Cited by 8 | Viewed by 8921
Abstract
In addition to the different technologies of silicon solar cells in crystalline form, TOPCon solar cells have an exceptionally great efficiency of 26%, accomplished by the manufacturing scale technique for industrialization, and have inordinate cell values of 732.3 mV open-circuit voltage (Voc [...] Read more.
In addition to the different technologies of silicon solar cells in crystalline form, TOPCon solar cells have an exceptionally great efficiency of 26%, accomplished by the manufacturing scale technique for industrialization, and have inordinate cell values of 732.3 mV open-circuit voltage (Voc) and a fill factor (FF) of 84.3%. The thickness of tunnel oxide, which is less than 2 nm in the TOPCon cell, primarily affects the electrical properties and efficiency of the cell. In this review, various techniques of deposition were utilized for the layer of SiOx tunnel oxide, such as thermal oxidation, ozone oxidation, chemical oxidation, and plasma-enhanced chemical vapor deposition (PECVD). To monitor the morphology of the surface, configuration of annealing, and rate of acceleration, a tunnel junction structure of oxide through a passivation quality of better Voc on a wafer of n-type cell might be accomplished. The passivation condition of experiments exposed to rapid thermal processing (RTP) annealing at temperatures more than 900 °C dropped precipitously. A silicon solar cell with TOPCon technology has a front emitter with boron diffusion, a tunnel-SiOx/n+-poly-Si/ SiNx:H configuration on the back surface, and electrodes on both sides with screen printing technology. The saturation current density (J0) for such a configuration on a refined face remains at 1.4 fA/cm2 and is 3.8 fA/cm2 when textured surfaces of the cell are considered, instead of printing with silver contacts. Following the printing of contacts with Ag, the J0 of the current configuration improves to 50.8 fA/cm2 on textured surface of silicon, which is moderately lesser for the metal contact. Tunnel oxide layers were deposited using many methods such as chemical, ozone, thermal, and PECVD oxidation are often utilized to deposit the thin SiOx layer in TOPCon solar cells. The benefits and downsides of each approach for developing a SiOx thin layer depend on the experiment. Thin SiOx layers may be produced using HNO3:H2SO4 at 60 °C. Environmentally safe ozone oxidation may create thermally stable SiOx layers. Thermal oxidation may build a tunnel oxide layer with low surface recombination velocity (10 cm/s). PECVD oxidation can develop SiOx on several substrates at once, making it cost-effective. Full article
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6 pages, 2742 KiB  
Article
Low-Temperature In-Induced Holes Formation in Native-SiOx/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires
by Rodion R. Reznik, Konstantin P. Kotlyar, Vladislav O. Gridchin, Evgeniy V. Ubyivovk, Vladimir V. Federov, Artem I. Khrebtov, Dmitrii S. Shevchuk and George E. Cirlin
Materials 2020, 13(16), 3449; https://doi.org/10.3390/ma13163449 - 5 Aug 2020
Cited by 1 | Viewed by 2416
Abstract
The reduction of substrate temperature is important in view of the integration of III–V materials with a Si platform. Here, we show the way to significantly decrease substrate temperature by introducing a procedure to create nanoscale holes in the native-SiOx layer on [...] Read more.
The reduction of substrate temperature is important in view of the integration of III–V materials with a Si platform. Here, we show the way to significantly decrease substrate temperature by introducing a procedure to create nanoscale holes in the native-SiOx layer on Si(111) substrate via In-induced drilling. Using the fabricated template, we successfully grew self-catalyzed GaAs nanowires by molecular-beam epitaxy. Energy-dispersive X-ray analysis reveals no indium atoms inside the nanowires. This unambiguously manifests that the procedure proposed can be used for the growth of ultra-pure GaAs nanowires. Full article
(This article belongs to the Special Issue Electronic Materials and Devices)
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22 pages, 3938 KiB  
Review
Characterization of SiO2/4H-SiC Interfaces in 4H-SiC MOSFETs: A Review
by Patrick Fiorenza, Filippo Giannazzo and Fabrizio Roccaforte
Energies 2019, 12(12), 2310; https://doi.org/10.3390/en12122310 - 17 Jun 2019
Cited by 110 | Viewed by 12146
Abstract
This paper gives an overview on some state-of-the-art characterization methods of SiO2/4H-SiC interfaces in metal oxide semiconductor field effect transistors (MOSFETs). In particular, the work compares the benefits and drawbacks of different techniques to assess the physical parameters describing the electronic [...] Read more.
This paper gives an overview on some state-of-the-art characterization methods of SiO2/4H-SiC interfaces in metal oxide semiconductor field effect transistors (MOSFETs). In particular, the work compares the benefits and drawbacks of different techniques to assess the physical parameters describing the electronic properties and the current transport at the SiO2/SiC interfaces (interface states, channel mobility, trapping phenomena, etc.). First, the most common electrical characterization techniques of SiO2/SiC interfaces are presented (e.g., capacitance- and current-voltage techniques, transient capacitance, and current measurements). Then, examples of electrical characterizations at the nanoscale (by scanning probe microscopy techniques) are given, to get insights on the homogeneity of the SiO2/SiC interface and the local interfacial doping effects occurring upon annealing. The trapping effects occurring in SiO2/4H-SiC MOS systems are elucidated using advanced capacitance and current measurements as a function of time. In particular, these measurements give information on the density (~1011 cm−2) of near interface oxide traps (NIOTs) present inside the SiO2 layer and their position with respect to the interface with SiC (at about 1–2 nm). Finally, it will be shown that a comparison of the electrical data with advanced structural and chemical characterization methods makes it possible to ascribe the NIOTs to the presence of a sub-stoichiometric SiOx layer at the interface. Full article
(This article belongs to the Special Issue Volume II: Semiconductor Power Devices)
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