Search Results (31)

This study aims to establish a methodology that integrates experimental measurements with finite element analysis (FEA) to investigate the mechanical behavior and dynamic characteristics of soft–hard laminated composites fabricated via additive manufacturing (AM) under dynamic excitation. A hybrid AM technique was employed, using the PolyJet process based on stereolithography (SLA) to fabricate composite beam structures composed of alternating soft and hard materials. Initially, impact tests using a steel ball on cantilever beams made of hard material were conducted to inversely calculate the first natural frequency via time–frequency analysis, thereby identifying Young’s modulus and Poisson’s ratio. For the viscoelastic soft material, tensile and stress relaxation tests were performed to construct a Generalized Maxwell Model, from which the Prony series parameters were derived. Subsequently, symmetric and asymmetric multilayer composite beams were fabricated and subjected to impact testing. The experimental results were compared with FEA simulations to evaluate the accuracy and validity of the identified material parameters of different structural configurations under vibration modes. The research focuses on the time- and frequency-dependent stiffness response of the composite by hard and soft materials and integrating this behavior into structural dynamic simulations. The specific objectives of the study include (1) establishing the Prony series parameters for the soft material integrated with hard material and implementing them in the FE model, (2) validating the accuracy of resonant frequencies and dynamic responses through combined experimental and simulation, (3) analyzing the influence of composite material symmetry and thickness ratio on dynamic modals, and (4) comparing simulation results with experimental measurements to assess the reliability and accuracy of the proposed modeling framework. Full article

This work presents the theoretical design and finite element modeling of high-sensitivity microcantilevers for biosensing applications, integrating piezoelectric actuation with novel ultrananocrystalline diamond (UNCD) structures. Microcantilevers were designed based on projections to grow a multilayer metal/AlN/metal/UNCD stack on silicon substrates, optimized to detect adsorption of biomolecules on the surface of exposed UNCD microcantilevers at the picogram scale. A central design criterion was to match the microcantilever’s eigenfrequency with the resonant frequency of the AlN-based piezoelectric actuator, enabling efficient dynamic excitation. The beam length was tuned to ensure a ≥2 kHz resonant frequency shift upon adsorption of 1 pg of mass distributed on the exposed surface of a UNCD-based microcantilever. Subsequently, a Gaussian distribution mass function with a variance of 5 µm was implemented to evaluate the resonant frequency shift upon mass addition at a certain point on the microcantilever where a variation from 600 Hz to 100 Hz was observed when the mass distribution center was located at the tip of the microcantilever and the piezoelectric borderline, respectively. Both frequency and time domain analyses were performed to predict the resonance behavior, oscillation amplitude, and quality factor. To ensure the reliability of the simulations, the model was first validated using experimental results reported in the literature for an AlN/nanocrystalline diamond (NCD) microcantilever. The results confirmed that the AlN/UNCD architecture exhibits higher resonant frequencies and enhanced sensitivity compared to equivalent AlN/Si structures. The findings demonstrate that using a UNCD-based microcantilever not only improves biocompatibility but also significantly enhances the mechanical performance of the biosensor, offering a robust foundation for the development of next-generation MEMS-based biochemical detection platforms. The research reported here introduces a novel design methodology that integrates piezoelectric actuation with UNCD microcantilevers through eigenfrequency matching, enabling efficient picogram-scale mass detection. Unlike previous approaches, it combines actuator and cantilever optimization within a unified finite element framework, validated against experimental data published in the literature for similar piezo-actuated sensors using materials with inferior biocompatibility compared with the novel UNCD. The dual-domain simulation strategy offers accurate prediction of key performance metrics, establishing a robust and scalable path for next-generation MEMS biosensors. Full article

Nonlinear correction was performed on the mechanical motion of ultra-thin cantilever beams, and strain effects were calculated on ultra-thin multi-layer heterogeneous material stacked cantilever beams. The atomic structure and piezoelectric properties of ZnO were studied using first-principles calculations. In this study, generalized gradient approximations of Perdew–Burke–Erzerhof (GGA-PBE) functionals and Plain Wave Basis Sets were used to calculate the electronic structure, density of states, energy bands, charge density, and piezoelectric coefficient of intrinsic ZnO. Research and calculations were conducted on Li-doped ZnO with different ratios. According to our calculations, as the Li doping ratio increases from 0 to 10%, the bandgap width of ZnO material increases from 0.74 to 1.21 eV. The results for the density of states and partial density of states indicate that the increase in band gap is due to the movement of Zn-3d states towards the high-energy end, and the piezoelectric coefficient of the material increases from 2.07 to 3.3 C/m². Meanwhile, based on the optimized Li-doped ZnO cantilever beam accelerometer, an ultra-thin cantilever beam accelerometer with a sensitivity of 7.04 mV/g was fabricated. Full article

Passive-wireless surface-acoustic-wave (SAW) micro-pressure sensors are suitable for extreme scenarios where wired sensors are not applicable. However, as the measured pressure decreases, conventional SAW micro-pressure sensors struggle to meet expected performance due to insufficient sensitivity. This article proposes a a method of using an ${\mathrm{A}}_2$-mode Lamb SAW sensor and introduces an inertial structure in the form of a cantilever beam to enhance sensitivity. An MEMS-compatible manufacturing process was employed to create a multi-layer structure of ${\mathrm{SiO}}_2$, $\mathrm{AlN}$, and $\mathrm{SOI}$ for the SAW micro-pressure sensor. To investigate the operational performance of the SAW micro-pressure sensor, a micro-pressure testing system was established. The experimental results demonstrate that the sensor exhibits high sensitivity to micro-pressure, validating the effectiveness of the proposed design. Full article

Vibration is a major problem that can cause structures to wear out prematurely and even fail. Smart structures are a promising solution to this problem because they can be equipped with actuators, sensors, and controllers to reduce or eliminate vibration. The primary objective of this paper is to explore and compare two deep learning-based approaches for vibration control in cantilever beams. The first approach involves the direct application of deep learning techniques, specifically multi-layer neural networks and RNNs, to control the beam’s dynamic behavior. The second approach integrates deep learning into the tuning process of a PID controller, optimizing its parameters for improved control performance. To activate the structure, two different input signals are used, an impulse signal at time zero and a random one. Through this comparative analysis, the paper aims to evaluate the effectiveness, strengths, and limitations of each method, offering insights into their potential applications in the field of smart structure control. Full article

Polyimides (PIs) have been extensively used in thin film and micro-electromechanical system (MEMS) processes based on their excellent thermal and mechanical stability and high glass transition temperature. This research explores the development of a novel multilayer and multifunctional polymer composite electro-piezomagnetic device that can function as an energy harvester or sensor for current-carrying wires or magnetic field sensing. The devices consist of four layers of composite materials with a polyimide matrix. The composites have various nanoparticles to alter the functionality of each layer. Nanoparticles of Ag were used to increase the electrical conductivity of polyimide and act as electrodes; lead zirconate titanate was used to make the piezoelectric composite layer; and either neodymium iron boron (NdFeB) or Terfenol-D was used to make the magnetic and magnetostrictive composite layer, which was used as the proof mass. A novel all-polymer multifunctional polyimide composite cantilever was developed to operate at low frequencies. This paper compares the performance of the different magnetic masses, shapes, and concentrations, as well as the development of an all-magnetostrictive device to detect voltage or current changes when coupled to the magnetic field from a current-carrying wire. The PI/PZT cantilever with the PI/NdFeB proof mass demonstrated higher voltage output compared to the PI/Terfenol-D proof mass device. However, the magnetostrictive composite film could be operated without a piezoelectric film based on the Villari effect, which consisted of a single PI-Terfenol-D film. The paper illustrates the potential to develop an all-polymer composite MEMS device capable of acting as a magnetic field or current sensor. Full article

With the advancement of semiconductor manufacturing technology, thin film structures were widely used in MEMS devices. These films played critical roles in providing support, reinforcement, and insulation in MEMS devices. However, due to their microscopic dimensions, the sensitivity of their parameters and performance to thermal stress increased significantly. In this study, a Pirani gauge sample with a multilayer thin film structure was designed and fabricated. Based on this sample, finite element modeling analysis and thermal stress experiments were conducted. The finite element modeling analysis employed a combination of steady-state and transient methods to simulate the deformation and stress distribution of the device at room temperature (25 °C), low temperature (−55 °C), and high temperature (125 °C). The thermal stress test involved placing the sample in a temperature cycling chamber for temperature cycling tests. After the tests, the resonant frequency and surface deformation of the device were measured to quantitatively evaluate the impact of thermal stress on the deformation and resonant frequency parameters of the device. After the experiments, it was found that the clamped-end beams made of Pt were a stress concentration area. Additionally, the repetitive thermal load caused the cantilever beam to move cyclically in the Z direction. This movement altered the deformation of the film and the resonant frequency. The suspended film exhibited concavity, and the overall trend of the resonant frequency was downward. Over time, this could even lead to the fracture of the clamped-end beams. The variation of mechanical parameters derived from finite element simulations and experiments provided an important reference value for device design improvement and played a crucial role in enhancing the reliability of thin film devices. Full article

Examining crack propagation at the interface of bimaterial components under various conditions is essential for improving the reliability of semiconductor designs. However, the fracture behavior of bimaterial interfaces has been relatively underexplored in the literature, particularly in terms of numerical predictions. Numerical simulations offer vital insights into the evolution of interfacial damage and stress distribution in wafers, showcasing their dependence on material properties. The lack of knowledge about specific interfaces poses a significant obstacle to the development of new products and necessitates active remediation for further progress. The objective of this paper is twofold: firstly, to experimentally investigate the behavior of bimaterial interfaces commonly found in semiconductors under quasi-static loading conditions, and secondly, to determine their respective interfacial cohesive properties using an inverse cohesive zone modeling approach. For this purpose, double cantilever beam specimens were manufactured that allow Mode I static fracture analysis of the interfaces. A compliance-based method was used to obtain the crack size during the tests and the Mode I energy release rate ($G_{Ic}$). Experimental results were utilized to simulate the behavior of different interfaces under specific test conditions in Abaqus. The simulation aimed to extract the interfacial cohesive contact properties of the studied bimaterial interfaces. These properties enable designers to predict the strength of the interfaces, particularly under Mode I loading conditions. To this extent, the cohesive zone modeling (CZM) assisted in defining the behavior of the damage propagation through the bimaterial interfaces. As a result, for the silicon–epoxy molding compound (EMC) interface, the results for maximum strength and $G_{Ic}$ are, respectively, 26 MPa and 0.05 N/mm. The second interface tested consisted of polyimide and silicon oxide between the silicon and EMC layers, and the results obtained are 21.5 MPa for the maximum tensile strength and 0.02 N/mm for $G_{Ic}$. This study’s findings aid in predicting and mitigating failure modes in the studied chip packaging. The insights offer directions for future research, focusing on enhancing material properties and exploring the impact of manufacturing parameters and temperature conditions on delamination in multilayer semiconductors. Full article

The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was used to identify chemical ingredients in materials with high sensitivity, and external voltage was measured in mV. The maximum voltage generated for the sensor was 39 mV. This range of voltage is suitable for sensing electronic systems. The angle change in a microcantilever in a liquid or gas environment identifies a material’s chemical ingredients. A microcantilever deflects, resulting in varying voltages in the analysis of materials. COMSOL software and equations were used for analytical simulations to determine the optimal design parameters. COMSOL software model development and MEMS design were involved in the analytical simulations. This paper examines an analytical model of the cantilever and discusses the fabrication process. Full article

A metal-multilayered nanomechanical cantilever sensor was proposed to reduce the temperature effect for highly sensitive gas molecular detection. The multilayer structure of the sensor reduces the bimetallic effect, allowing for the detection of differences in molecular adsorption properties on various metal surfaces with higher sensitivity. Our results indicate that the sensor exhibits higher sensitivity to molecules with greater polarity under mixed conditions with nitrogen gas. We demonstrate that stress changes caused by differences in molecular adsorption on different metal surfaces can be detected and that this approach could be used to develop a gas sensor with selectivity for specific gas species. Full article

Multilayered magnetoelectric materials are of great interest for investigations due to their unique tuneable properties and giant values of magnetoelectric effect. The flexible layered structures consisting of soft components can reveal lower values of the resonant frequency for the dynamic magnetoelectric effect appearing in bending deformation mode. The double-layered structure based on the piezoelectric polymer polyvinylidene fluoride and a magnetoactive elastomer (MAE) with carbonyl iron particles in a cantilever configuration was investigated in this work. The gradient AC magnetic field was applied to the structure, causing the bending of the sample due to the attraction acting on the magnetic component. The resonant enhancement of the magnetoelectric effect was observed. The main resonant frequency for the samples depended on the MAE properties, namely, their thickness and concentration of iron particles, and was 156–163 Hz for a 0.3 mm MAE layer and 50–72 Hz for a 3 mm MAE layer; the resonant frequency depended on bias DC magnetic field as well. The results obtained can extend the application area of these devices for energy harvesting. Full article

China has abundant coal resources, and the distribution of coal seams is complex. Thick coal seams account for more than 45% of all coal seams. Fully mechanized top coal caving mining has the advantages of large production, high efficiency, and low cost. In fully mechanized caving mining, especially in fully mechanized caving mining of extra-thick coal seams, the mining space is ample, the mine pressure is severe, and the roadway maintenance is complex. As a result, it is necessary to summarize and discuss the gob-side entry driving of fully mechanized caving in theory and technology, which will help to promote the further development of fully mechanized caving gob-side entry driving technology. First, in recent years, the research hotspots of gob-side entry driving have focused on the deformation mechanism and the control method of the roadway surrounding rock. Secondly, this paper discusses the theoretical models of the “triangle-block” and “beam” for the activity law of the overlying strata in gob-side entry driving, including the lateral breaking “large structure” model, compound key triangle block structure model in the middle and low position, the high and low right angle key block stability mechanics model, elastic foundation beam model, low-level combined cantilever beam + high-level multilayer masonry beam structure model, and the vertical triangular slip zone structure model. It introduces the “internal and external stress field theory” and the “stress limit equilibrium zone model”. Thirdly, it summarizes several numerical simulation analysis methods in different conditions or research focuses and selects appropriate constitutive models and simulation software. Finally, it introduces surrounding rock control technology, including two ribs, the roof, and under challenging conditions. It provides a method reference for support in similar projects. Full article

Piezo-driven resonant fiber optic scanners are gaining more and more attention due to their simple structure, weak electromagnetic radiation, and non-friction loss. Conventional piezo-driven resonant fiber optic scanners typically use quadrature piezoelectric tubes (piezo tubes) operating in 31-mode with high drive voltage and low excitation efficiency. In order to solve the abovementioned problem, a resonant fiber scanner driven by co-fired multilayer piezoelectric ceramics (CMPCs) is proposed in which four CMPCs drive a cantilevered fiber optic in the first-order bending mode to achieve efficient and fast space-filling scanning. In this paper, the cantilever beam vibration model with base displacement excitation was derived to provide a theoretical basis for the design of the fiber optic scanner. The finite element method was used to guide the dynamic design of the scanner. Finally, the dynamics characteristics and scanning trajectory of the prepared scanner prototype were tested and compared with the theoretical and simulation calculation results. Experimental results showed that the scanner can achieve three types of space-filling scanning: spiral, Lissajous, and propeller. Compared with the structure using piezo tubes, the designed scanner achieved the same scanning range with smaller axial dimensions, lower drive voltage, and higher efficiency. The scanner can achieve a free end displacement of 10 mm in both horizontal and vertical directions under a sinusoidal excitation signal of 50 V_p-p and 200 Hz. The theoretical, simulation and experimental results validate the feasibility of the proposed scanner structure and provide new ideas for the design of resonant fiber optic scanners. Full article

In this work, multiferroic cantilevers comprise a layer of a magnetoactive elastomer (MAE) and a commercially available piezoelectric polymer-based vibration sensor. The structures are fixed at one end in the horizontal plane and the magnetic field is applied vertically. First, the magnetoelectric (ME) response to uniform, triangle-wave magnetic fields with five different slew rates is investigated experimentally. Time and field dependences of the generated voltage, electric charge, and observed mechanical deflection are obtained and compared for four different thicknesses of the MAE layer. The ME responses to triangular and sinusoidal wave excitations are examined in contrast. Second, the ME response at low frequencies (≤3 Hz) is studied by the standard method of harmonic magnetic field modulation. The highest ME coupling coefficient is observed in the bias magnetic field strength of ≈73 kA/m and it is estimated to be about 3.3 ns/m (ME voltage coefficient ≈ 25 V/A) at theoretically vanishing modulation frequency ($f\to 0$ Hz). Presented results demonstrate that the investigated heterostructures are promising for applications as magnetic-field sensors and energy harvesting devices. Full article

In this work, the resonance enhancement of magnetoelectric (ME) coupling at the two lowest bending resonance frequencies was investigated in layered cantilever structures comprising a magnetoactive elastomer (MAE) slab and a commercially available piezoelectric polymer multilayer. A cantilever was fixed at one end in the horizontal plane and the magnetic field was applied horizontally. Five composite structures, each containing an MAE layer of different thicknesses from 0.85 to 4 mm, were fabricated. The fundamental bending resonance frequency in the absence of a magnetic field varied between roughly 23 and 55 Hz. It decreased with the increasing thickness of the MAE layer, which was explained by a simple theory. The largest ME voltage coefficient of about 7.85 V/A was measured in a sample where the thickness of the MAE layer was ≈2 mm. A significant increase in the bending resonance frequencies in the applied DC magnetic field of 240 kA/m up to 200% was observed. The results were compared with alternative designs for layered multiferroic structures. Directions for future research were also discussed. Full article