Search Results (39)

This study examines the impact of Au nanoparticles (Au-NPs) on the chemoresistive gas sensing properties as a function of particle size. The sensing material is composed of ultrathin CuO/Cu₂O films, which are fabricated by either thermal deposition technology or spray pyrolysis. These are used on a silicon nitride (Si₃N₄) micro hotplate (µh) chip with Pt electrodes and heaters. The gas sensing material is then functionalised with Au-NP of varying sizes (12, 20, and 40 nm, checked by transmission electron microscopy) using drop coating technology. The finalised sensors are tested by measuring the electrical resistance against various target gases, including carbon monoxide (CO), carbon dioxide (CO₂), and a mixture of hydrocarbons (HC_Mix), in order to evaluate any cross-sensitivity issues. While the sensor response is markedly contingent on the structural surface, our findings indicate that the dimensions of the Au-NPs exert a discernible influence on the sensor’s behaviour in response to varying target gases. The 50 nm thermally evaporated CuO/Cu₂O layers exhibited the highest sensor response of 78% against 2000 ppm CO₂. In order to gain further insight into the surface of the sensors, a scanning electron microscope (SEM) was employed, and to gain information about the composition, Raman spectroscopy was also utilised. Full article

The challenging problem of chlorine “poisoning” SnO₂ for poorly recoverable detection of dichloromethane has been solved in this work. The materials synthesized by Ni or/and Mo doping SnO₂ were spread onto the micro-hotplates (<1 mm³) to fabricate the MEMS sensors with a low power consumption (<45 mW). The sensor based on Mo·Ni co-doped SnO₂ is evidenced to have the best sensing performance of significant response and recoverability to dichloromethane between 0.07 and 100 ppm at the optimized temperature of 310 °C, in comparison with other sensors in this work and the literature. It can be attributed to a synergetic effect of Mo·Ni co-doping into SnO₂ as being supported by characterization of geometrical and electronic structures. The sensing mechanism of dichloromethane on the material is investigated. In situ infrared spectroscopy (IR) peaks identify that the corresponding adsorbed species are too strong to desorb, although it has demonstrated a good recoverability of the material. A probable reason is the formation rates of the strongly adsorbed species are much slower than those of the weakly adsorbed species, which are difficult to form significant IR peaks but easy to desorb, thus enabling the material to recover. Theoretical analysis suggests that the response process is kinetically determined by molecular transport onto the surface due to the free convection from the concentration gradient during the redox reaction, and the output steady voltage thermodynamically follows the equation only formally identical to the Langmuir–Freundlich equation for physisorption but is newly derived from statistical mechanics. Full article

Chemical sensors, relying on electrical conductance changes in a gas-sensitive material due to the surrounding gas, have the (dis-)advantage of reacting with multiple target gases and humidity. In this work, we report CMOS-integrated SnO₂ thin film-based gas sensors, which are functionalized with mono-, bi-, and trimetallic nanoparticles (NPs) to optimize the sensor performance. The spray pyrolysis technology was used to deposit the metal oxide sensing layer on top of a CMOS-fabricated micro-hotplate (µhp), and magnetron sputtering inert-gas condensation was employed to functionalize the sensing layer with metallic NPs, Ag-, Pd-, and Ru-NPs, and all combinations thereof were used as catalysts to improve the sensor response to carbon monoxide and to suppress the cross-sensitivity toward humidity. The focus of this work is the detection of toxic carbon monoxide and a specific hydrocarbon mixture (HC_mix) in a concentration range of 5–50 ppm at different temperatures and humidity levels. The use of CMOS chips ensures low-power, integrated sensors, ready to apply in cell phones, watches, etc., for air quality-monitoring purposes. Full article

Cryofixation by ultra-rapid freezing is widely regarded as the gold standard for preserving cell structure without artefacts for electron microscopy. However, conventional cryofixation technologies are not compatible with live imaging, making it difficult to capture dynamic cellular processes at a precise time. To overcome this limitation, we recently introduced a new technology, called microfluidic cryofixation. The principle is based on micro-hotplates counter-cooled with liquid nitrogen. While the power is on, the sample inside a foil-embedded microchannel on top of the micro-hotplate is kept warm. When the heater is turned off, the thermal energy is drained rapidly and the sample freezes. While this principle has been demonstrated experimentally with small samples (<0.5 mm²), there is an important trade-off between the attainable cooling rate, sample size, and heater power. Here, we elucidate these connections by theoretical modeling and by measurements. Our findings show that cooling rates of 10⁶ K s⁻¹, which are required for the vitrification of pure water, can theoretically be attained in samples up to ∼1 mm wide and 5 μm thick by using diamond substrates. If a heat sink made of silicon or copper is used, the maximum thickness for the same cooling rate is reduced to ∼3 μm. Importantly, cooling rates of 10⁴ K s⁻¹ to 10⁵ K s⁻¹ can theoretically be attained for samples of arbitrary area. Such rates are sufficient for many real biological samples due to the natural cryoprotective effect of the cytosol. Thus, we expect that the vitrification of millimeter-scale specimens with thicknesses in the 10 μm range should be possible using micro-hotplate-based microfluidic cryofixation technology. Full article

We demonstrate the systematic optimization of SnO₂-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO₂ films are integrated on CMOS-based micro-hotplate devices, where each chip contains 16 sensor devices in total. We found that the response of the sensor device can be significantly tuned to specific target gases, such as CO and VOCs, by using various types of NPs. Full article

Herein, we prepared two different MOS-based gas sensors with integrated micro-hotplates. The two sensors were employed to detect various fragrances (cedar, mandarin orange, rose A, and rose B), exhibiting similarly great sensing performances. The gas sensing properties of the MOS-based sensor depend on the sensor’s operating temperature. In addition to isothermal operation, various pulse heating modes were applied to investigate the gas sensing performances with respect to the four fragrances. Multivariate gas sensing features of the four fragrances were obtained under different operating modes, which were utilized for the recognition of fragrance odors successfully, based on the long short-term memory (LSTM) algorithm. Full article

We herein demonstrate the pulsed-mode temperature operation of chemical sensor devices based on thin SnO₂ films, which were synthesized by magnetron sputtering. The gas-sensitive films were integrated on SiN-based micro-hotplate (µhp) chips, which enable operation temperatures up to 500 °C. We compared the gas sensor performance in constant temperature mode with pulsed temperature mode operation towards the test gases carbon monoxide and toluene. In contrast to constant temperature, the pulsed temperature mode operation reveals additional information about the type of test gas. Full article

The uCVD (microchemical vapor deposition) graphene growth system is an improved CVD system that is suitable for scientific research and experimental needs, and it is characterized by its rapid, convenient, compact, and low-cost features. The micro-hotplate based on an SOI wafer is the core component of this system. To meet the requirements of the uCVD system for the micro-hotplate, we propose a suspended multi-cantilever heating platform composed of a heating chip, cantilevers, and bracket. In this article, using heat transfer theory and thermoelectric simulation, we demonstrate that the silicon resistivity, current input cross-sectional size, and the convective heat transfer coefficient have a huge impact on the performance of the micro-heating platform. Therefore, in the proposed solution, we adopt a selective doping process to achieve a differentiated configuration of silicon resistivity in the cantilevers and heating chip, ensuring that the heating chip meets the requirements for graphene synthesis while allowing the cantilevers to withstand high currents without damage. Additionally, by adding brackets, the surfaces of the micro-hotplate have the same convective heat transfer environment, reducing the surface temperature difference, and improving the cooling rate. The simulation results indicate that the temperature on the micro-hotplate surface can reach 1050.8 °C, and the maximum temperature difference at different points on the surface is less than 2 °C, which effectively meets the requirements for the CVD growth of graphene using Cu as the catalyst. Full article

This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and its temperature is monitored by temperature-sensing resistors on both sides. The designed micro-hotplate is placed at the bottom of the resonator chip as a heater and insulated by airgel. The PID pulse width modulation (PWM) circuit controls the heater according to the temperature detection result to provide a constant temperature for the resonator. The proposed oven-controlled MEMS resonator (OCMR) exhibits a frequency drift of 3.5 ppm. Compared with the previously reported similar methods, first, the OCMR structure using airgel combined with a micro-hotplate is proposed for the first time, and the working temperature is extended from 85 °C to 125 °C. Second, our work does not require redesign or additional constraints on the MEMS resonator, so the proposed structure is more general and can be practically applied to other MEMS devices that require temperature control. Full article

In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 °C. The micro-hotplate heats to nearly 240 °C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors. Full article

The article presents research on ergonomics, biophysical comfort and safety of protective clothing. The resistance of the structural, thermal and mechanical properties of five fabrics (CBXS400, GG200T, Twaron CT736, Dyneema HB26 and T1790C), differing in geometry and raw material composition used in space suits, to dangerous ionizing radiation (β and γ) occurring in space was tested. For both types of radiation, four identical one-time doses in the range of 25–100 kGy were used. The effect of the applied absorbed doses of β and γ radiation on the parameters of textiles influencing ergonomics and safety of the cosmonaut’s work was verified by structural tests (micro-computed tomography and optical microcopy), thermal resistance tests (sweating guarded-hotplate) and strength tests (tensile testing machine). Experimental studies of thermal properties are supplemented with heat transport simulations using the finite volume method performed with 3D models of real textiles. The greatest reduction of thermal resistance for Twaron CT736 (−0.0667 m²·°C·W⁻¹ for 100 kGy of β-radiation) and Dyneema HB26 (−0.0347 m²·°C·W⁻¹ for 50 kGy of β-radiation) is observed. Strength tests have shown that all tested textiles are resistant to both types of radiation. Three textiles were selected to create a three-layer assembly with potential application in a cosmonaut’s glove (Extravehicular Activity—EVA). Full article

Micro-hotplates (MHPs) have become widely used basic structures in many micro sensors and actuators. Based on the analysis of the general heat transfer model, we propose a new MHP design based on a transversal composite dielectric layer, consisting of different heat transfer materials. Two general proven materials with different thermal conductivity, Si₃N₄ and SiO₂, are chosen to form the composite dielectric layer. An annular heater is designed with a plurality of concentric rings connected with each other. The relationship between MHP performance and its geometrical parameters, including temperature distribution and uniformity, thermal deformation, and power dissipation, has been fully investigated using COMSOL simulation. The results demonstrate that the new planar MHP of 2 μm thick with a Si₃N₄-SiO₂ composite dielectric layer and annular heater can reach 300 °C at a power of 35.2 mW with a mechanical deformation of 0.132 μm, at a large heating area of about 0.5 mm². The introduction of the composite dielectric layer effectively reduces the lateral heat conduction loss and alleviates the mechanical deformation of the planar MHP compared with a single SiO₂ dielectric layer or Si₃N₄ dielectric layer. Full article

Micro-hotplate gas sensors are widely used in air quality monitoring, identification of hazardous chemicals, human health monitoring, and other fields due to their advantages of small size, low power consumption, excellent consistency, and fast response speed. The micro-hotplate gas sensor comprises a micro-hotplate and a gas-sensitive material layer. The micro-hotplate is responsible for providing temperature conditions for the sensor to work. The gas-sensitive material layer is responsible for the redox reaction with the gas molecules to be measured, causing the resistance value to change. The gas-sensitive material film with high stability, fantastic adhesion, and amazing uniformity is prepared on the surface of the micro-hotplate to realize the reliable assembly of the gas-sensitive material and the micro-hotplate, which can improve the response speed, response value, and selectivity. This paper first introduces the classification and structural characteristics of micro-hotplates. Then the assembly process and characteristics of various gas-sensing materials and micro-hotplates are summarized. Finally, the assembly method of the gas-sensing material and the micro-hotplate prospects. Full article

Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired pattern in the tiny sensing area of a microsensor is highly demanded. In this work, we combine area-selective seed layer formation and hydrothermal growth for the in-situ growth of ZnO nanowires (NWs) on Micro-electromechanical Systems (MEMS)-based micro-hotplate gas sensors. The results show that the ZnO NWs are densely grown in the sensing area. With Pd nano-particles’ modification of the ZnO NWs, the sensor is used for hydrogen (H₂) detection. The sensors with Pd-ZnO NWs show good repeatability as well as a reversible and uniform response to 2.5 ppm–200 ppm H₂. Our approach offers a technical route for designing various kinds of gas sensors. Full article

Continuous monitoring of greenhouse gases with high spatio-temporal resolution has lately become an urgent task because of tightening environmental restrictions. It may be addressed with an economically efficient solution, based on semiconductor metal oxide gas sensors. In the present work, CO₂ detection in the relevant concentration range and ambient conditions was successfully effectuated by fine-particulate La₂O₃-based materials. Flame spray pyrolysis technique was used for the synthesis of sensitive materials, which were studied with X-ray diffraction (XRD), Fourier-transform infrared spectroscopy (FTIR), diffuse reflectance infrared Fourier transform spectroscopy (DRIFTs) and low temperature nitrogen adsorption coupled with Brunauer–Emmett–Teller (BET) effective surface area calculation methodology. The obtained materials represent a composite of lanthanum oxide, hydroxide and carbonate phases. The positive correlation has been established between the carbonate content in the as prepared materials and their sensor response towards CO₂. Small dimensional planar MEMS micro-hotplates with low energy consumption were used for gas sensor fabrication through inkjet printing. The sensors showed highly selective CO₂ detection in the range of 200–6667 ppm in humid air compared with pollutant gases (H₂ 50 ppm, CH₄ 100 ppm, NO₂ 1 ppm, NO 1 ppm, NH₃ 20 ppm, H₂S 1 ppm, SO₂ 1 ppm), typical for the atmospheric air of urbanized and industrial area. Full article