Search Results (5)

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode at about 6.3 MHz. The MEMS resonator is operated in one-port configuration and it is connected to a spiral coil, forming the sensor unit. A proximate electronic interrogation unit is electromagnetically coupled through a readout coil to the sensor unit. The proposed technique exploits interleaved excitation and detection phases of the MEMS resonator. A tailored electronic circuit manages the periodic switching between the excitation phase, where it generates the excitation signal driving the readout coil, and the detection phase, where it senses the transient decaying response of the resonator by measuring through a high-impedance amplifier the voltage induced back across the readout coil. This approach advantageously ensures that the readout frequency of the MEMS resonator is first order independent of the interrogation distance between the readout and sensor coils. The reported experimental results show successful contactless readout of the MEMS resonator independently from the interrogation distance over a range of 12 mm, and the application as a resonant sensor for ambient temperature and as a resonant acoustic-load sensor to detect and track the deposition and evaporation processes of water microdroplets on the MEMS resonator surface. Full article

Contactless readout of passive LC sensors composed of a capacitance sensor connected to a coil can be performed through an electromagnetically coupled readout coil set at distance d. Resonant frequency f_s and Q-factor Q_S of the LC sensor can be extracted from the measurement of the impedance at the readout coil by using a technique theoretically independent of d. This work investigates the effects on the measurement accuracy due to the unavoidable parasitic capacitance C_P in parallel to the readout coil, which makes the measured values of f_s and Q_S dependent on d. Numerical analysis and experimental tests confirm such dependence. To overcome this limitation, a novel electronic circuit topology for the compensation of C_P is proposed. The experimental results on assembled prototypes show that for a LC sensor with f_s ≈ 5.48 MHz a variation of less than 200 ppm across an interrogation distance between 2 and 18 mm is achieved with the proposed compensation circuit. Full article

Coil-coupled passive sensors can be interrogated without contact, exploiting the magnetic coupling between two coils forming a telemetric proximity link. A primary coil connected to the interface circuit forms the readout unit, while a passive sensor connected to a secondary coil forms the sensor unit. This work is focused on the interrogation of sensor units based on resonance, denoted as resonant sensor units, in which the readout signals are the resonant frequency and, possibly, the quality factor. Specifically, capacitive and electromechanical piezoelectric resonator sensor units are considered. Two interrogation techniques, namely a frequency-domain technique and a time-domain technique, have been analyzed, that are theoretically independent of the coupling between the coils which, in turn, ensure that the sensor readings are not affected by the interrogation distance. However, it is shown that the unavoidable parasitic capacitance in parallel to the readout coil introduces, for both techniques, an undesired dependence of the readings on the interrogation distance. This effect is especially marked for capacitance sensor units. A compensation circuit is innovatively proposed to counteract the effects of the parasitic input capacitance, and advantageously obtain distance-independent readings in real operating conditions. Experimental tests on a coil-coupled capacitance sensor with resonance at 5.45 MHz have shown a deviation within 1.5 kHz, i.e., 300 ppm, for interrogation distances of up to 18 mm. For the same distance range, with a coil-coupled quartz crystal resonator with a mechanical resonant frequency of 4.432 MHz, variations of less than 1.8 Hz, i.e., 0.5 ppm, have been obtained. Full article

This paper presents a measurement technique and system for the contactless interrogation of capacitive sensors via electromagnetic coupling. The interrogation unit employs a primary coil to periodically excite the capacitive sensor connected to a secondary coil forming an LC resonant circuit. When the excitation to the primary coil is switched off the damped response of the LC circuit is detected. As a fundamental advantage compared to techniques based on reflected impedance, this approach ensures that the readout frequency is to first order independent of the interrogation distance between the two coils. The system has been tested with reference capacitors and with a capacitive liquid level sensor. The experimental results are in a good agreement with theoretical expectations and show a sensitivity of about −23 kHz/pF at 5.4 MHz and the possibility to operate with interrogation distances up to few centimeters. Full article

A technique for contactless electromagnetic interrogation of AT-cut quartz piezoelectric resonator sensors is proposed based on a primary coil electromagnetically air-coupled to a secondary coil connected to the electrodes of the resonator. The interrogation technique periodically switches between interleaved excitation and detection phases. During the excitation phase, the resonator is set into vibration by a driving voltage applied to the primary coil, whereas in the detection phase, the excitation signal is turned off and the transient decaying response of the resonator is sensed without contact by measuring the voltage induced back across the primary coil. This approach ensures that the readout frequency of the sensor signal is to a first order approximation independent of the interrogation distance between the primary and secondary coils. A detailed theoretical analysis of the interrogation principle based on a lumped-element equivalent circuit is presented. The analysis has been experimentally validated on a 4.432 MHz AT-cut quartz crystal resonator, demonstrating the accurate readout of the series resonant frequency and quality factor over an interrogation distance of up to 2 cm. As an application, the technique has been applied to the measurement of liquid microdroplets deposited on a 4.8 MHz AT-cut quartz crystal. More generally, the proposed technique can be exploited for the measurement of any physical or chemical quantities affecting the resonant response of quartz resonator sensors. Full article