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14 pages, 17626 KB  
Article
Resonant Capacitive MEMS Coupled to a T-Shaped Acoustic Cavity for Enhanced Photoacoustic Gas Detection
by Fanny Pages, Julien Charensol, Tarek Seoudi, Julie Goutorbe, Loni Laporte, Diba Ayache, Fadia Abou Naoum, Eric Rosenkrantz, Aurore Vicet and Michael Bahriz
Sensors 2025, 25(24), 7523; https://doi.org/10.3390/s25247523 - 11 Dec 2025
Viewed by 1674
Abstract
To address the lack of compact and high-performance gas sensors in the literature, a miniaturized photoacoustic sensor has been developed using a resonant capacitive MEMS specifically designed for gas detection. Its performance is enhanced by coupling it to a T-shaped acoustic cavity, which [...] Read more.
To address the lack of compact and high-performance gas sensors in the literature, a miniaturized photoacoustic sensor has been developed using a resonant capacitive MEMS specifically designed for gas detection. Its performance is enhanced by coupling it to a T-shaped acoustic cavity, which confines and directs the acoustic waves toward the transducer. Electrical and photoacoustic characterizations were carried out to determine the nominal capacitance and resonance frequency of the device. The acoustic coupling resulted in a significant improvement in the transducer’s mechanical response, while the linearity of the sensor was confirmed over a broad concentration range. This improvement led to a reduction in the limit of detection (LOD) from 186 ppmv to 16 ppmv. In parallel, the Normalized Noise-Equivalent Absorption (NNEA) metric improved from 1.49×107W·cm1·Hz1/2 to 1.28×108W·cm1·Hz1/2, representing a 11-fold increase in sensitivity. Stability over time is confirmed through Allan–Werle deviation analysis, confirming the reliability of the signal over extended measurement periods. These results demonstrate that coupling a resonant MEMS transducer to a well-designed acoustic cavity is an efficient strategy to significantly improve the sensitivity of photoacoustic gas detection systems. Full article
(This article belongs to the Special Issue Photoacoustic Sensing and Imaging: Hardware, Algorithm and AI)
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10 pages, 1118 KB  
Communication
A Compact Highly Sensitive Cone–Sphere Photoacoustic Spectroscopy Sensor for Real-Time Detection of Dissolved Acetylene in Transformer Oil
by Jiao Yang and Yazhou Liu
Photonics 2025, 12(12), 1208; https://doi.org/10.3390/photonics12121208 - 8 Dec 2025
Viewed by 1554
Abstract
In this work, we report a compact and highly sensitive photoacoustic spectroscopy (PAS) system based on a cone–sphere coupled photoacoustic cell (CSC-PAC) for real-time detection of trace acetylene (C2H2) dissolved in transformer oil. The sensing module integrates a conical [...] Read more.
In this work, we report a compact and highly sensitive photoacoustic spectroscopy (PAS) system based on a cone–sphere coupled photoacoustic cell (CSC-PAC) for real-time detection of trace acetylene (C2H2) dissolved in transformer oil. The sensing module integrates a conical resonator with a spherical cavity, forming a hybrid structure that effectively enhances photoacoustic confinement and energy coupling efficiency. Finite element thermo-viscoelastic simulations were employed to optimize the cavity geometry and resonance conditions for maximum signal generation. Experimental results demonstrate a strong linear correlation between the photoacoustic signal and C2H2 concentration (R2 > 0.999), with a sensitivity of 2.45 µV·ppm−1. Allan deviation confirms a detection limit of 18.6 ppb is achieved at a 400 s averaging time, confirming excellent system stability. The miniaturized light-acoustic spectroscopy sensor, with a total volume of 7.5 mL and a rapid response time of 25.5 s, provides a high-performance and field-deployable platform for on-site monitoring of high-voltage power equipment and other industrial applications. Full article
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13 pages, 1863 KB  
Article
A Compact 2.3 μm DFB-Laser CO Sensor Using MPC-LITES for Real-Time Monitoring of Cigarette Smoke
by Leqing Lin, Haoyang Lin, Guantian Hong, Jianfeng He, Lihao Wang, Ruobin Zhuang, Wenguo Zhu, Yongchun Zhong, Jianhui Yu and Huadan Zheng
Sensors 2025, 25(22), 6894; https://doi.org/10.3390/s25226894 - 12 Nov 2025
Viewed by 658
Abstract
A compact and high-sensitivity carbon monoxide (CO) detection system based on multi-pass cell enhanced light-induced thermoelastic spectroscopy (MPC-LITES) was developed for real-time monitoring. A 2.3 μm distributed feedback (DFB) diode laser targeting the CO absorption line at 4300.699 cm−1 was employed, offering [...] Read more.
A compact and high-sensitivity carbon monoxide (CO) detection system based on multi-pass cell enhanced light-induced thermoelastic spectroscopy (MPC-LITES) was developed for real-time monitoring. A 2.3 μm distributed feedback (DFB) diode laser targeting the CO absorption line at 4300.699 cm−1 was employed, offering strong line intensity and minimal interference from H2O, CO2, NO2, and SO2. The optimal modulation depth of 0.76 cm−1 produced the maximum second harmonic (2f) signal. Experimental results demonstrated excellent linearity (R2 = 0.998) and a minimum detection limit of 230 ppb at 1 s, further reduced to 47 ppb at 367 s by Allan deviation analysis. Application tests were carried out for real-time monitoring of cigarette smoke in a 20 m2 indoor environment. Under closed conditions, the CO concentration rapidly increased to approximately 165 ppm, while in ventilated conditions, it peaked at 45 ppm and decayed quickly due to air exchange. The results confirm that the proposed MPC-LITES sensor enables accurate, real-time detection of transient CO variations, demonstrating strong potential for indoor air quality evaluation, environmental safety, and public health protection. Full article
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15 pages, 2747 KB  
Article
Characterization and Performance Analysis of Underwater Optical Time and Frequency Dissemination Link Based on Monte Carlo Simulation and Experimental Demonstration
by Yibo Yuan, Hengrui Liu, Ziyi Wang, Hanwen Zhang, Xujin Li, Jianfeng Cui and Yiguang Yang
Sensors 2025, 25(22), 6861; https://doi.org/10.3390/s25226861 - 10 Nov 2025
Viewed by 554
Abstract
Underwater Wireless Optical Communication (UWOC) plays a crucial role in marine exploration and observation due to its high speed and low latency characteristics, while research on underwater time and frequency transfer (UTFT) is relatively lacking. The complicated underwater environments, absorption and scattering effects [...] Read more.
Underwater Wireless Optical Communication (UWOC) plays a crucial role in marine exploration and observation due to its high speed and low latency characteristics, while research on underwater time and frequency transfer (UTFT) is relatively lacking. The complicated underwater environments, absorption and scattering effects severely degrade signal stability and signal-to-noise-ratio (SNR). In response to this issue, a photon packet transmission model is established based on the Monte Carlo simulation (MCS). The effects of different parameters, including water conditions, divergence angles, receiving apertures, are systematically analyzed, with key indicators such as phase noise and Allan deviation, identified as performance measures. An experimental platform is also built using kaolin turbidity to obtain experimental results corresponding to different frequencies and turbidity levels, which are then compared with simulation results. The high consistency between simulation and experimental results verifies the reliability of the proposed model. This research provides a feasible method for performance prediction and tolerance design of UTFT networks. Full article
(This article belongs to the Section Optical Sensors)
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13 pages, 2189 KB  
Article
A Distributed Microwave Signal Transmission System for Arbitrary Multi-Node Download
by Ju Wang, Xuemin Su, Jinlong Yu, Hao Luo, Ye Gao, Xu Han and Changsheng Huang
Photonics 2025, 12(7), 714; https://doi.org/10.3390/photonics12070714 - 16 Jul 2025
Cited by 1 | Viewed by 527
Abstract
A stable microwave signal transmission system for a distributed system that is capable of simultaneous downloads at multiple arbitrary nodes within the optical path is proposed. The download module, which is based on optical circulators and optical couplers, can be inserted at any [...] Read more.
A stable microwave signal transmission system for a distributed system that is capable of simultaneous downloads at multiple arbitrary nodes within the optical path is proposed. The download module, which is based on optical circulators and optical couplers, can be inserted at any node position within the transmission optical path to complete the downloading of frequency-synchronization signals. Experimentally, a distributed frequency-synchronization system with multiple download nodes is demonstrated over 40 km of optical fiber. Experimental results show that the signal has been downlink-transferred from different download modules with the standard deviation of phase jitter being 1°@10 GHz at 1 h through 40-km optical fiber. Moreover, the standard deviation of phase jitter between downloaded signals from any two download modules is also better than 1°@10 GHz at 1 h. In addition, the Allan Deviation is better than 1012@1 h for the download module. Full article
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8 pages, 1057 KB  
Article
Time Domain Statistics for Evaluating Residual Noise, Including Instabilities in Time/Frequency Transfer Systems
by Thomas Parker
Time Space 2025, 1(1), 3; https://doi.org/10.3390/timespace1010003 - 8 Jun 2025
Cited by 1 | Viewed by 1010
Abstract
The instabilities in time and frequency transfer systems, a form of residual noise, can contribute significantly to the total uncertainty in time or frequency comparisons. Understanding the characteristics of transfer instabilities is increasingly important with the new high-stability optical frequency standards being developed. [...] Read more.
The instabilities in time and frequency transfer systems, a form of residual noise, can contribute significantly to the total uncertainty in time or frequency comparisons. Understanding the characteristics of transfer instabilities is increasingly important with the new high-stability optical frequency standards being developed. First-difference statistics such as the rms Time Interval Error (TIErms), the Frequency Transfer Uncertainty (FTU), and ADEVS (a novel use of the Allan deviation equation) provide a more direct and accurate measure of residual noise than second-difference statistics such as the Allan Deviation (ADEV), the Modified Allan Deviation (MDEV), and the Time Deviation (TDEV). A unifying discussion on the use of existing first-difference statistics with residual noise, introduced individually in two previous publications, is presented here. Simulated noise data is then analyzed to illustrate the differences in the various statistics. Their strengths and weaknesses are discussed. The impact of pre-averaging phase (time) data is also shown. Full article
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12 pages, 16116 KB  
Article
All-Fiber LITES Sensor Based on Hollow-Core Anti-Resonant Fiber and Self-Designed Low-Frequency Quartz Tuning Fork
by Xiaorong Sun, Weipeng Chen, Ying He, Haiyue Sun, Shunda Qiao and Yufei Ma
Sensors 2025, 25(9), 2933; https://doi.org/10.3390/s25092933 - 6 May 2025
Cited by 2 | Viewed by 1094
Abstract
In this paper, an all-fiber light-induced thermoelastic spectroscopy (LITES) sensor based on hollow-core anti-resonant fiber (HC-ARF) and self-designed low-frequency quartz tuning fork (QTF) is reported for the first time. By utilizing HC-ARF as both the transmission medium and gas chamber, the laser tail [...] Read more.
In this paper, an all-fiber light-induced thermoelastic spectroscopy (LITES) sensor based on hollow-core anti-resonant fiber (HC-ARF) and self-designed low-frequency quartz tuning fork (QTF) is reported for the first time. By utilizing HC-ARF as both the transmission medium and gas chamber, the laser tail fiber was spatially coupled with the HC-ARF, and the end of the HC-ARF was directly guided onto the QTF surface, resulting in an all-fiber structure. This design eliminated the need for lens combinations, thereby enhancing system stability and reducing cost and size. Additionally, a self-designed rectangular-tip QTF with a low resonant frequency of 8.69 kHz was employed to improve the sensor’s detection performance. Acetylene (C2H2), with an absorption line at 6534.37 cm−1 (1.53 μm), was chosen as the target gas. Experimental results clearly demonstrated that the detection performance of the rectangular-tip QTF system was 2.9-fold higher than that of a standard commercial QTF system. Moreover, it exhibited an outstanding linear response to varying C2H2 concentrations, indicating its high sensitivity and reliability in detecting C2H2. The Allan deviation analysis was used to assess the system’s stability, and the results indicated that the system exhibits excellent long-term stability. Full article
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19 pages, 5486 KB  
Article
Extraction of Periodic Terms in Satellite Clock Bias Based on Fourier Basis Pursuit Bandpass Filter
by Cong Shen, Guocheng Wang, Lintao Liu, Dong Ren, Huiwen Hu and Wenlong Sun
Remote Sens. 2025, 17(5), 827; https://doi.org/10.3390/rs17050827 - 27 Feb 2025
Cited by 2 | Viewed by 994
Abstract
Effective noise management and control of periodic fluctuations in spaceborne atomic clocks are essential for the accuracy and reliability of Global Navigation Satellite Systems. Time-varying periodic terms can impact both the performance evaluation and prediction accuracy of satellite clocks, making it crucial to [...] Read more.
Effective noise management and control of periodic fluctuations in spaceborne atomic clocks are essential for the accuracy and reliability of Global Navigation Satellite Systems. Time-varying periodic terms can impact both the performance evaluation and prediction accuracy of satellite clocks, making it crucial to mitigate these influences in the clock bias. We propose methods based on the Fourier dictionary and basis pursuit, namely the Fourier basis pursuit (FBP) spectrum and the Fourier basis pursuit bandpass filter (FBPBPF), to analyze and extract periodic terms in the satellite clock bias. The FBP method minimizes the L1-norm to improve spectral quality, while the FBPBPF reduces boundary effects and noise. Our experimental results show that the FBP spectrum has a more obvious main lobe and reduces spectral leakage compared to traditional windowed Fourier transforms. In simulation experiments, the FBPBPF achieves periodic term extraction with errors reduced by 6.81% to 26.55% compared to traditional signal processing methods, and boundary extraction errors reduced by up to 63.67%. Using the BeiDou Navigation Satellite System’s precise clock bias for verification, the FBP-based prediction method has significantly improved the prediction accuracy compared to the spectral analysis model. For 6, 12, 18, and 24 h predictions, the average root mean square error of the FBP prediction method is reduced by 15.85%, 11.04%, 6.45%, and 4.01%, respectively. Full article
(This article belongs to the Special Issue Advances in GNSS for Time Series Analysis)
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13 pages, 9604 KB  
Article
A Highly Sensitive Light-Induced Thermoelastic Spectroscopy Sensor Using a Charge Amplifier to Improve the Signal-to-Noise Ratio
by Hanxu Ma, Shunda Qiao, Ying He and Yufei Ma
Sensors 2025, 25(3), 946; https://doi.org/10.3390/s25030946 - 5 Feb 2025
Cited by 3 | Viewed by 1314
Abstract
A highly sensitive light-induced thermoelastic spectroscopy (LITES) sensor employing a charge amplifier (CA) is reported for the first time in this invited paper. CA has the merits of high input impedance and strong anti-interference ability. The usually used transimpedance amplifier (TA) and voltage [...] Read more.
A highly sensitive light-induced thermoelastic spectroscopy (LITES) sensor employing a charge amplifier (CA) is reported for the first time in this invited paper. CA has the merits of high input impedance and strong anti-interference ability. The usually used transimpedance amplifier (TA) and voltage amplifier (VA) were also studied under the same conditions for comparison. A standard commercial quartz tuning fork (QTF) with a resonant frequency of approximately 32.76 kHz was used as the photothermal signal transducer. Methane (CH4) was used as the target gas in these sensors for performance verification. Compared to the TA-LITES sensor and VA-LITES sensor, the reported CA-LITES sensor shows improvements of 1.83 times and 5.28 times in the minimum detection limit (MDL), respectively. When compared to the LITES sensor without an amplifier (WA-LITES), the MDL has a 19.96-fold improvement. After further optimizing the gain of the CA, the MDL of the CA-LITES sensor was calculated as 2.42 ppm, which further improved the performance of the MDL by 30.3 times compared to the WA-LITES. Additionally, long-term stability is analyzed using Allan deviation analysis. When the average time of the sensor system is increased to 50 s, the MDL of the CA-LITES sensor system can be improved to 0.58 ppm. Full article
(This article belongs to the Section Optical Sensors)
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11 pages, 4652 KB  
Article
Improving 795 nm Single-Frequency Laser’s Frequency Stability by Means of the Bright-State Spectroscopy with Rubidium Vapor Cell
by Junye Zhao, Yongbiao Yang, Lulu Zhang, Yang Li and Junmin Wang
Photonics 2024, 11(12), 1165; https://doi.org/10.3390/photonics11121165 - 11 Dec 2024
Cited by 1 | Viewed by 1962
Abstract
The utilization of atomic or molecular spectroscopy for frequency locking of single-frequency laser to improve laser frequency stability plays an important role in the experimental investigation of optically pumped atomic magnetometers, atomic clocks, laser cooling and trapping of atoms, etc. We have experimentally [...] Read more.
The utilization of atomic or molecular spectroscopy for frequency locking of single-frequency laser to improve laser frequency stability plays an important role in the experimental investigation of optically pumped atomic magnetometers, atomic clocks, laser cooling and trapping of atoms, etc. We have experimentally demonstrated a technique for frequency stabilization of a single-frequency laser employing the bright state spectroscopy (BSS) with a rubidium atomic vapor cell. By utilizing the counter-propagating dual-frequency 795 nm laser beams with mutually orthogonal linear polarization and a frequency difference of 6.834 GHz, which is equal to the hyperfine splitting of rubidium-87 ground state 5S1/2, an absorption-enhanced signal with narrow linewidth at the center of Doppler-broadened transmission spectroscopy is observed when continuous scanning the laser frequency over rubidium-87 D1 transition. This is the so-called BSS. Amplitude of the absorption-enhanced signal in the BSS is much larger compared with the conventional saturation absorption spectroscopy (SAS). The relationship between linewidth and amplitude of the BSS signal and laser beam intensity has been investigated. This high-contrast absorption-enhanced BSS signal has been employed for the laser frequency stabilization. The experimental results show that the frequency stability is 4.4×1011 with an integration time of 40 s, near one order of magnitude better than that for using the SAS. Full article
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12 pages, 10559 KB  
Article
Highly Sensitive T-Shaped Quartz Tuning Fork Based CH4-Light-Induced Thermoelastic Spectroscopy Sensor with Hydrogen and Helium Enhanced Technique
by Yuanzhi Wang, Ying He, Shunda Qiao, Xiaoming Duan and Yufei Ma
Sensors 2024, 24(23), 7743; https://doi.org/10.3390/s24237743 - 4 Dec 2024
Cited by 4 | Viewed by 2371
Abstract
In this paper, a highly sensitive methane (CH4) sensor based on light-induced thermoelastic spectroscopy (LITES) and a T-shaped quartz tuning fork (QTF) with hydrogen (H2) and helium (He) enhancement techniques are reported for the first time. The low resonant [...] Read more.
In this paper, a highly sensitive methane (CH4) sensor based on light-induced thermoelastic spectroscopy (LITES) and a T-shaped quartz tuning fork (QTF) with hydrogen (H2) and helium (He) enhancement techniques are reported for the first time. The low resonant frequency self-designed T-shaped QTF was exploited for improving the energy accumulation time. H2 and He were utilized as surrounding gases for the T-shaped QTF to minimize energy loss, thereby enhancing the sensitivity of the LITES sensor. Additionally, a fiber-coupled multi-pass cell (FC-MPC) with a 40 m optical length was utilized to improve the optical absorption of CH4. The frequency response of the T-shaped QTF with different concentrations of H2 and He was investigated, and the Q factor in the H2 and He environment increased significantly. Compared to operating QTF in a nitrogen (N2) environment, the signal amplitude was enhanced by 2.9 times and 1.9 times in pure H2 and He environments, respectively. This enhancement corresponded to a minimum detection limit (MDL) of 80.3 ppb and 113.6 ppb. Under different CH4 concentrations, the T-shaped QTF-based H2-enhanced CH4-LITES sensor showed an excellent linear response. Furthermore, through Allan deviation analysis, the MDL of the T-shaped QTF-based H2-enhanced CH4-LITES can reach 38 ppb with an 800 s integration time. Full article
(This article belongs to the Special Issue Important Achievements in Optical Measurements in China 2024–2025)
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11 pages, 3109 KB  
Article
Far-Detuning Laser Frequency Disturbance Suppression for Atomic Sensor Based on Intrinsic Fiber Fabry–Pérot Cavity
by Guanghui Li, Lihong Duan, Xinxiu Zhou and Wei Quan
Photonics 2024, 11(11), 1027; https://doi.org/10.3390/photonics11111027 - 30 Oct 2024
Cited by 2 | Viewed by 1274
Abstract
The method of laser far-detuned frequency locking is proposed based on a fiber Fabry–Perot cavity which transfers the ultra-stable atomic reference frequency stability to the target laser utilized for atomic sensors. The control transfer function of the closed-loop system is established to elucidate [...] Read more.
The method of laser far-detuned frequency locking is proposed based on a fiber Fabry–Perot cavity which transfers the ultra-stable atomic reference frequency stability to the target laser utilized for atomic sensors. The control transfer function of the closed-loop system is established to elucidate the process of perturbation suppression. It is illustrated that this method is robust against the disturbance to the laser and cavity by controlling the cavity with different parameters. After the long-term experimental test, the stability of the laser frequency locked on the fiber cavity achieves an Allan deviation of 9.9×1011 and the detuning of the nearest atomic frequency resonance point is more than 200 GHz. Its stability and detuning value exceed previous reports. Full article
(This article belongs to the Special Issue Optically Pumped Magnetometer and Its Application)
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18 pages, 9065 KB  
Article
Modeling of Solar Radiation Pressure for BDS-3 MEO Satellites with Inter-Satellite Link Measurements
by Yifei Lv, Zihao Liu, Rui Jiang and Xin Xie
Remote Sens. 2024, 16(20), 3900; https://doi.org/10.3390/rs16203900 - 20 Oct 2024
Cited by 2 | Viewed by 2363
Abstract
As the largest non-gravitational force, solar radiation pressure (SRP) causes significant errors in precise orbit determination (POD) of the BeiDou global navigation satellite system (BDS-3) medium Earth orbit (MEO) satellite. This is mainly due to the imperfect modeling of the satellite’s cuboid body. [...] Read more.
As the largest non-gravitational force, solar radiation pressure (SRP) causes significant errors in precise orbit determination (POD) of the BeiDou global navigation satellite system (BDS-3) medium Earth orbit (MEO) satellite. This is mainly due to the imperfect modeling of the satellite’s cuboid body. Since the BDS-3’s inter-satellite link (ISL) can enhance the orbit estimation of BDS-3 satellites, the aim of this study is to establish an a priori SRP model for the satellite body using 281-day ISL observations to reduce the systematic errors in the final orbits. The adjustable box wind (ABW) model is employed to refine the optical parameters for the satellite buses. The self-shadow effect caused by the search and rescue (SAR) antenna is considered. Satellite laser ranging (SLR), day-boundary discontinuity (DBD), and overlapping Allan deviation (OADEV) are utilized as indicators to assess the performance of the a priori model. With the a priori model developed by both ISL and ground observation, the slopes of SLR residual for the China Academy of Space Technology (CAST) and Shanghai Engineering Center for Microsatellites (SECM) satellites decrease from −0.097 cm/deg and 0.067 cm/deg to −0.004 cm/deg and −0.009 cm/deg, respectively. The standard deviation decreased by 21.8% and 26.6%, respectively. There are slight enhancements in the average values of DBD and OADEV, and a reduced β-dependent variation is observed in the OADEV of the corresponding clock offset. We also found that considering the SAR antenna only slightly improves the orbit accuracy. These results demonstrate that an a priori model established for the BDS-3 MEO satellite body can reduce the systematic errors in orbits, and the parameters estimated using both ISL and ground observation are superior to those estimated using only ground observation. Full article
(This article belongs to the Special Issue GNSS Positioning and Navigation in Remote Sensing Applications)
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15 pages, 3386 KB  
Article
Open-Path Cavity Ring-Down Spectroscopy for Simultaneous Detection of Hydrogen Chloride and Particles in Cleanroom Environment
by Muhammad Bilal Khan, Christian L’Orange, Cheongha Lim, Deokhyeon Kwon and Azer P. Yalin
Sensors 2024, 24(17), 5611; https://doi.org/10.3390/s24175611 - 29 Aug 2024
Cited by 1 | Viewed by 2653
Abstract
The present study addresses advanced monitoring techniques for particles and airborne molecular contaminants (AMCs) in cleanroom environments, which are crucial for ensuring the integrity of semiconductor manufacturing processes. We focus on quantifying particle levels and a representative AMC, hydrogen chloride (HCl), having known [...] Read more.
The present study addresses advanced monitoring techniques for particles and airborne molecular contaminants (AMCs) in cleanroom environments, which are crucial for ensuring the integrity of semiconductor manufacturing processes. We focus on quantifying particle levels and a representative AMC, hydrogen chloride (HCl), having known detrimental effects on equipment longevity, product yield, and human health. We have developed a compact laser sensor based on open-path cavity ring-down spectroscopy (CRDS) using a 1742 nm near-infrared diode laser source. The sensor enables the high-sensitivity detection of HCl through absorption by the 2-0 vibrational band with an Allan deviation of 0.15 parts per billion (ppb) over 15 min. For quantifying particle number concentrations, we examine various detection methods based on statistical analyses of Mie scattering-induced ring-down time fluctuations. We find that the ring-down distributions’ 3rd and 4th standard moments allow particle detection at densities as low as ~105 m−3 (diameter > 1 μm). These findings provide a basis for the future development of compact cleanroom monitoring instrumentation for wafer-level monitoring for both AMC and particles, including mobile platforms. Full article
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12 pages, 4242 KB  
Article
Enhanced Photoacoustic Spectroscopy Integrated with a Multi-Pass Cell for ppb Level Measurement of Methane
by Lihui Wang, Tie Zhang, Yan Huang, Yuhao Zheng, Gaoxuan Wang and Sailing He
Appl. Sci. 2024, 14(14), 6068; https://doi.org/10.3390/app14146068 - 11 Jul 2024
Cited by 4 | Viewed by 2543
Abstract
A compact photoacoustic spectroscopy system integrated with a non-coaxial multi-pass cell was developed for improving the instrument performance in the measurement of methane. The multi-pass cell with compact light spot mode was proposed for concentrating the light radiation within a limited space, which [...] Read more.
A compact photoacoustic spectroscopy system integrated with a non-coaxial multi-pass cell was developed for improving the instrument performance in the measurement of methane. The multi-pass cell with compact light spot mode was proposed for concentrating the light radiation within a limited space, which effectively reduces the instrument dimension. A distributed feedback (DFB) laser with a central wavelength of 1653 nm was employed to excite the photoacoustic signal of methane. A total of 21 round trips of reflection were achieved in an acoustic resonant cavity with a radius of 4 mm and a length of 36 mm. Four microphones were installed around the cavity to collect the signal. An 11-fold enhancement of the photoacoustic signal was achieved through the multi-pass cell, compared to a single-pass cell with dimension of 10 cm. The system was used to measure different concentrations of methane, which showed good linearity. The continuous detection of 10 ppm methane gas was carried out for 6000 s. The Allan standard deviation analysis indicates that the limit of detection of the system was 5.7 ppb with an optimum integration time of 300 s. Full article
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