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Journal: Metrology, 2025
Volume: 5
Number: 34
Article:
Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer
Authors:
by
So Ito, Takumi Yamagishi, Kimihisa Matsumoto and Kazuhide Kamiya
Link:
https://www.mdpi.com/2673-8244/5/2/34
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