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Journal: Metrology, 2025
Volume: 5
Number: 34

Article: Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer
Authors: by So Ito, Takumi Yamagishi, Kimihisa Matsumoto and Kazuhide Kamiya
Link: https://www.mdpi.com/2673-8244/5/2/34

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