Alexandrova, S.; Szekeres, A.; Valcheva, E.; Anastasescu, M.; Stroescu, H.; Nicolescu, M.; Gartner, M.
Formation of Nano-Sized Silicon Oxynitride Layers on Monocrystalline Silicon by Nitrogen Implantation. Micro 2026, 6, 24.
https://doi.org/10.3390/micro6020024
AMA Style
Alexandrova S, Szekeres A, Valcheva E, Anastasescu M, Stroescu H, Nicolescu M, Gartner M.
Formation of Nano-Sized Silicon Oxynitride Layers on Monocrystalline Silicon by Nitrogen Implantation. Micro. 2026; 6(2):24.
https://doi.org/10.3390/micro6020024
Chicago/Turabian Style
Alexandrova, Sashka, Anna Szekeres, Evgenia Valcheva, Mihai Anastasescu, Hermine Stroescu, Madalina Nicolescu, and Mariuca Gartner.
2026. "Formation of Nano-Sized Silicon Oxynitride Layers on Monocrystalline Silicon by Nitrogen Implantation" Micro 6, no. 2: 24.
https://doi.org/10.3390/micro6020024
APA Style
Alexandrova, S., Szekeres, A., Valcheva, E., Anastasescu, M., Stroescu, H., Nicolescu, M., & Gartner, M.
(2026). Formation of Nano-Sized Silicon Oxynitride Layers on Monocrystalline Silicon by Nitrogen Implantation. Micro, 6(2), 24.
https://doi.org/10.3390/micro6020024
