Next Article in Journal
Active Textile Glove for Cooling and Personal Protection
Previous Article in Journal
Ion Implantation Doping in Silicon Carbide and Gallium Nitride Electronic Devices
Article

Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams

Department of Electrical and Electronic Engineering, Imperial College London, Exhibition Road, London SW7 2AZ, UK
*
Author to whom correspondence should be addressed.
Micro 2022, 2(1), 54-67; https://doi.org/10.3390/micro2010003
Received: 20 December 2021 / Revised: 5 January 2022 / Accepted: 10 January 2022 / Published: 13 January 2022
(This article belongs to the Section Microscale Engineering)
Analytic approximations are presented for the response of buckling-mode electrothermal actuators with very slender beams with a width-to-length ratio of W/L0.001 of the type found in nanoelectromechanical systems (NEMS). The results are found as closed-form solutions to the Euler beam bending theory rather than by an iterative numerical solution or a time-consuming finite element analysis. Expressions for transverse deflections and stiffness are presented for actuators with the common raised cosine and chevron pre-buckled shapes. The approximations are valid when the effects of bending dominate over those of axial compression. A few higher-order approximations are also presented for less slender beams with 0.001W/L0.01. View Full-Text
Keywords: electrothermal actuator; beam buckling; MEMS; NEMS electrothermal actuator; beam buckling; MEMS; NEMS
Show Figures

Figure 1

MDPI and ACS Style

Syms, R.; Liu, D. Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams. Micro 2022, 2, 54-67. https://doi.org/10.3390/micro2010003

AMA Style

Syms R, Liu D. Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams. Micro. 2022; 2(1):54-67. https://doi.org/10.3390/micro2010003

Chicago/Turabian Style

Syms, Richard, and Dixi Liu. 2022. "Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams" Micro 2, no. 1: 54-67. https://doi.org/10.3390/micro2010003

Find Other Styles

Article Access Map by Country/Region

1
Back to TopTop