- Article
UV Nanoimprint Lithography—Impact of Coating Techniques on Pattern Quality
- Johanna Rimböck,
- Patrick Schuster,
- Lisa Vsetecka and
- Christine Thanner
In this work, three different coating techniques are compared and their applicability for ultraviolet nanoimprint lithography (UV-NIL) is investigated. As UV-NIL is considered a suitable volume manufacturing production solution for various emerging a...

