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Journal: Solids, 2022
Volume: 3
Number: 18

Article: Investigation of the Tetrakis(dimethylamino)hafnium and H2S ALD Process: Effects of Deposition Temperature and Annealing
Authors: by Zsófia Baji, Zsolt Fogarassy, Attila Sulyok and Péter Petrik
Link: https://www.mdpi.com/2673-6497/3/2/18

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