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Journal: Solids, 2022
Volume: 3
Number: 18
Article:
Investigation of the Tetrakis(dimethylamino)hafnium and H2S ALD Process: Effects of Deposition Temperature and Annealing
Authors:
by
Zsófia Baji, Zsolt Fogarassy, Attila Sulyok and Péter Petrik
Link:
https://www.mdpi.com/2673-6497/3/2/18
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