Hafnium Zirconium Oxide Thin Films for CMOS Compatible Pyroelectric Infrared Sensors †
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Mart, C.; Czernohorsky, M.; Kühnel, K.; Weinreich, W. Hafnium Zirconium Oxide Thin Films for CMOS Compatible Pyroelectric Infrared Sensors. Eng. Proc. 2021, 6, 27. https://doi.org/10.3390/I3S2021Dresden-10138
Mart C, Czernohorsky M, Kühnel K, Weinreich W. Hafnium Zirconium Oxide Thin Films for CMOS Compatible Pyroelectric Infrared Sensors. Engineering Proceedings. 2021; 6(1):27. https://doi.org/10.3390/I3S2021Dresden-10138
Chicago/Turabian StyleMart, Clemens, Malte Czernohorsky, Kati Kühnel, and Wenke Weinreich. 2021. "Hafnium Zirconium Oxide Thin Films for CMOS Compatible Pyroelectric Infrared Sensors" Engineering Proceedings 6, no. 1: 27. https://doi.org/10.3390/I3S2021Dresden-10138