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Journal: Eng. Proc., 2021
Volume: 6
Number: 27
Article:
Hafnium Zirconium Oxide Thin Films for CMOS Compatible Pyroelectric Infrared Sensors
Authors:
by
Clemens Mart, Malte Czernohorsky, Kati Kühnel and Wenke Weinreich
Link:
https://www.mdpi.com/2673-4591/6/1/27
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