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Journal: Eng. Proc., 2021
Volume: 10
Number: 2
Article:
Optimization of Focused Ion Beam Patterning Parameters for Direct Integration of Plasmonic Nanostructures on Silicon Photodiodes
Authors:
by
Elia Scattolo, Alessandro Cian, Damiano Giubertoni, Giovanni Paternoster, Luisa Petti and Paolo Lugli
Link:
https://www.mdpi.com/2673-4591/10/1/2
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