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Journal: Eng. Proc., 2021
Volume: 10
Number: 2
2
Article: Optimization of Focused Ion Beam Patterning Parameters for Direct Integration of Plasmonic Nanostructures on Silicon Photodiodes
Authors: by Elia Scattolo, Alessandro Cian, Damiano Giubertoni, Giovanni Paternoster, Luisa Petti and Paolo Lugli
Link: https://www.mdpi.com/2673-4591/10/1/2

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