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Journal: Plasma, 2021
Volume: 4
Number: 18
269-280
Article: Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)
Authors: by Masaomi Sanekata, Hiroshi Nishida, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Naoyuki Hirata, Hiroaki Yamamoto, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu and Kiyokazu Fuke
Link: https://www.mdpi.com/2571-6182/4/2/18

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