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Proceeding Paper

Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators †

by
Daniel Platz
*,
Georg Pfusterschmied
and
Ulrich Schmid
TU Wien, Institute of Sensor and Actuator Systems, Gußhaustraße 27-29, A-1040 Vienna, Austria
*
Author to whom correspondence should be addressed.
†
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 896; https://doi.org/10.3390/proceedings2130896
Published: 27 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
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Abstract

Resonant micro- and nanoelectromechanical systems (MEMS/NEMS) are typically subject to interaction with a liquid or gaseous environment. Recently, it has been demonstrated that non-conventional eigenmodes exhibit remarkably high quality factors (Q factors) in liquids. However, the physical origin of this phenomenon remains elusive. Here we introduce a definition of non-conventional eigenmodes for cantilever structures and develop a boundary integral method for describing the interaction of an incompressible viscous fluid and a non-conventional eigenmode of a MEMS/NEMS resonator. With this framework we are able to study the influence of the mode shape on the fluid-structure interaction.
Keywords: MEMS; NEMS; fluid sensing; fluid-structure interaction; stokes flow; boundary integral method; damping; quality factor MEMS; NEMS; fluid sensing; fluid-structure interaction; stokes flow; boundary integral method; damping; quality factor

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MDPI and ACS Style

Platz, D.; Pfusterschmied, G.; Schmid, U. Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators. Proceedings 2018, 2, 896. https://doi.org/10.3390/proceedings2130896

AMA Style

Platz D, Pfusterschmied G, Schmid U. Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators. Proceedings. 2018; 2(13):896. https://doi.org/10.3390/proceedings2130896

Chicago/Turabian Style

Platz, Daniel, Georg Pfusterschmied, and Ulrich Schmid. 2018. "Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators" Proceedings 2, no. 13: 896. https://doi.org/10.3390/proceedings2130896

APA Style

Platz, D., Pfusterschmied, G., & Schmid, U. (2018). Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators. Proceedings, 2(13), 896. https://doi.org/10.3390/proceedings2130896

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