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Proceeding Paper

On-Chip Temperature Compensation for Thermal Impedance Sensors

Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany
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Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 1053; https://doi.org/10.3390/proceedings2131053
Published: 27 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
Electrical impedance spectroscopy is a widespread characterization method for solids or fluids in industrial applications. We here report on its thermal equivalent, the “thermal impedance spectroscopy”, improved by using a temperature compensation method for temperature dependent thermal measurements using an on-chip reference resistor.
Keywords: thermal impedance; 3-omega; temperature compensation thermal impedance; 3-omega; temperature compensation
MDPI and ACS Style

Jaegle, M.; Pernau, H.-F.; Pfützner, M.; Benkendorf, M.; Li, X.; Bartel, M.; Drost, S.; Wöllenstein, J. On-Chip Temperature Compensation for Thermal Impedance Sensors. Proceedings 2018, 2, 1053. https://doi.org/10.3390/proceedings2131053

AMA Style

Jaegle M, Pernau H-F, Pfützner M, Benkendorf M, Li X, Bartel M, Drost S, Wöllenstein J. On-Chip Temperature Compensation for Thermal Impedance Sensors. Proceedings. 2018; 2(13):1053. https://doi.org/10.3390/proceedings2131053

Chicago/Turabian Style

Jaegle, Martin, Hans-Fridtjof Pernau, Marcus Pfützner, Mike Benkendorf, Xinke Li, Markus Bartel, Susanne Drost, and Jürgen Wöllenstein. 2018. "On-Chip Temperature Compensation for Thermal Impedance Sensors" Proceedings 2, no. 13: 1053. https://doi.org/10.3390/proceedings2131053

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