Neff, B.; Casset, F.; Millet, A.; Agache, V.; Verplanck, N.; Boizot, F.; Fanget, S.
Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications. Proceedings 2017, 1, 386.
https://doi.org/10.3390/proceedings1040386
AMA Style
Neff B, Casset F, Millet A, Agache V, Verplanck N, Boizot F, Fanget S.
Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications. Proceedings. 2017; 1(4):386.
https://doi.org/10.3390/proceedings1040386
Chicago/Turabian Style
Neff, Baptiste, Fabrice Casset, Arnaud Millet, Vincent Agache, Nicolas Verplanck, François Boizot, and Stéphane Fanget.
2017. "Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications" Proceedings 1, no. 4: 386.
https://doi.org/10.3390/proceedings1040386
APA Style
Neff, B., Casset, F., Millet, A., Agache, V., Verplanck, N., Boizot, F., & Fanget, S.
(2017). Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications. Proceedings, 1(4), 386.
https://doi.org/10.3390/proceedings1040386
