Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range †
Nastro, A.; Ferrari, M.; Russo, A.-L.; Ardito, R.; Ferrari, V. Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range. Proceedings 2017, 1, 383. https://doi.org/10.3390/proceedings1040383
Nastro A, Ferrari M, Russo A-L, Ardito R, Ferrari V. Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range. Proceedings. 2017; 1(4):383. https://doi.org/10.3390/proceedings1040383
Chicago/Turabian StyleNastro, Alessandro, Marco Ferrari, Alfio-Lip Russo, Raffaele Ardito, and Vittorio Ferrari. 2017. "Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range" Proceedings 1, no. 4: 383. https://doi.org/10.3390/proceedings1040383