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Journal: Proceedings, 2017
Volume: 1
Number: 383

Article: Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range
Authors: by Alessandro Nastro, Marco Ferrari, Alfio-Lip Russo, Raffaele Ardito and Vittorio Ferrari
Link: https://www.mdpi.com/2504-3900/1/4/383

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