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Proceeding Paper

1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration †

1
Department de Physique, Université Grenoble Alpes, F38000 Grenoble, France
2
CEA, LETI, Minatec Campus, F-38054 Grenoble, France
3
Matériaux et Phénomènes Quantiques, Université Paris Diderot, CNRS UMR 7162, Sorbonne Paris Cité, 75013 Paris, France
4
Vistec Electron Beam GmbH, Ilmstrass 4, 07743 JENA, Germany
*
Authors to whom correspondence should be addressed.
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Proceedings 2017, 1(4), 347; https://doi.org/10.3390/proceedings1040347
Published: 28 August 2017
(This article belongs to the Proceedings of Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017)
Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. We demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for real-world applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors. These high-Q microdisks allow their Brownian motion to be resolved at few 100 MHz in ambient air. Such performance shows our VLSI process is a viable approach for the next generation of high-end sensors operating in vacuum, gas or liquid phase.
Keywords: optomechanics; microdisk resonators; quality factor; whispering gallery mode; radial breathing mode; very large scale integration optomechanics; microdisk resonators; quality factor; whispering gallery mode; radial breathing mode; very large scale integration
MDPI and ACS Style

Hermouet, M.; Banniard, L.; Sansa, M.; Fafin, A.; Gely, M.; Pauliac, S.; Brianceau, P.; Dallery, J.-A.; Allain, P.E.; Santos, E.G.; Favero, I.; Alava, T.; Jourdan, G.; Hentz, S. 1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration. Proceedings 2017, 1, 347. https://doi.org/10.3390/proceedings1040347

AMA Style

Hermouet M, Banniard L, Sansa M, Fafin A, Gely M, Pauliac S, Brianceau P, Dallery J-A, Allain PE, Santos EG, Favero I, Alava T, Jourdan G, Hentz S. 1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration. Proceedings. 2017; 1(4):347. https://doi.org/10.3390/proceedings1040347

Chicago/Turabian Style

Hermouet, Maxime, Louise Banniard, Marc Sansa, Alexandre Fafin, Marc Gely, Sébastien Pauliac, Pierre Brianceau, Jacques-Alexandre Dallery, Pierre Etienne Allain, Eduardo Gil Santos, Ivan Favero, Thomas Alava, Guillaume Jourdan, and Sébastien Hentz. 2017. "1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration" Proceedings 1, no. 4: 347. https://doi.org/10.3390/proceedings1040347

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