1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration†
AbstractCavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. We demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for real-world applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors. These high-Q microdisks allow their Brownian motion to be resolved at few 100 MHz in ambient air. Such performance shows our VLSI process is a viable approach for the next generation of high-end sensors operating in vacuum, gas or liquid phase.
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Hermouet, M.; Banniard, L.; Sansa, M.; Fafin, A.; Gely, M.; Pauliac, S.; Brianceau, P.; Dallery, J.-A.; Allain, P.E.; Santos, E.G.; Favero, I.; Alava, T.; Jourdan, G.; Hentz, S. 1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration. Proceedings 2017, 1, 347.
Hermouet M, Banniard L, Sansa M, Fafin A, Gely M, Pauliac S, Brianceau P, Dallery J-A, Allain PE, Santos EG, Favero I, Alava T, Jourdan G, Hentz S. 1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration. Proceedings. 2017; 1(4):347.Chicago/Turabian Style
Hermouet, Maxime; Banniard, Louise; Sansa, Marc; Fafin, Alexandre; Gely, Marc; Pauliac, Sébastien; Brianceau, Pierre; Dallery, Jacques-Alexandre; Allain, Pierre Etienne; Santos, Eduardo Gil; Favero, Ivan; Alava, Thomas; Jourdan, Guillaume; Hentz, Sébastien. 2017. "1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration." Proceedings 1, no. 4: 347.
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