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Proceeding Paper

High Sensitivity Ultraviolet Light Off-Stoichiometric Silicon Oxide-Based Sensors †

by
Jesús Carrillo
*,
José Alberto Luna
,
Godofredo García
and
Héctor Juárez
Universidad Autónoma de Puebla, Av. San Claudio y 14 Sur. Cp. 72570, Puebla, Mexico
*
Author to whom correspondence should be addressed.
†
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Proceedings 2017, 1(4), 382; https://doi.org/10.3390/proceedings1040382
Published: 25 August 2017
(This article belongs to the Proceedings of Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017)
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Abstract

We have developed a UV silicon detector made of silicon and off-stoichiometric silicon dioxide that shows high efficiency and is completely compatible with silicon devices technology. The silicon-based UV detector present a solar cell-like structure which does not require any voltage source. In addition, an off-stoichiometric silicon dioxide film (Silicon Rich Oxide) with silicon nanocrystals has been integrated to this structure. It is shown that the spectral response is due to the high photoluminescence of Si nanocrystals in the visible region when illuminated with UV light and an increase of 100% in the UV detector efficiency is observed with respect to conventional silicon dioxide layers.
Keywords: Silicon Rich Oxide; UV detectors; Si nanocrystals; solar cell-like structure Silicon Rich Oxide; UV detectors; Si nanocrystals; solar cell-like structure

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MDPI and ACS Style

Carrillo, J.; Luna, J.A.; García, G.; Juárez, H. High Sensitivity Ultraviolet Light Off-Stoichiometric Silicon Oxide-Based Sensors. Proceedings 2017, 1, 382. https://doi.org/10.3390/proceedings1040382

AMA Style

Carrillo J, Luna JA, García G, Juárez H. High Sensitivity Ultraviolet Light Off-Stoichiometric Silicon Oxide-Based Sensors. Proceedings. 2017; 1(4):382. https://doi.org/10.3390/proceedings1040382

Chicago/Turabian Style

Carrillo, Jesús, José Alberto Luna, Godofredo García, and Héctor Juárez. 2017. "High Sensitivity Ultraviolet Light Off-Stoichiometric Silicon Oxide-Based Sensors" Proceedings 1, no. 4: 382. https://doi.org/10.3390/proceedings1040382

APA Style

Carrillo, J., Luna, J. A., García, G., & Juárez, H. (2017). High Sensitivity Ultraviolet Light Off-Stoichiometric Silicon Oxide-Based Sensors. Proceedings, 1(4), 382. https://doi.org/10.3390/proceedings1040382

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