Next Article in Journal
Wireless Sensing System for Long-Time Assistance in the Parkinson’s Disease
Previous Article in Journal
High Sensitivity Ultraviolet Light Off-Stoichiometric Silicon Oxide-Based Sensors
Article Menu
Issue 4 (Eurosensors 2017) cover image

Export Article

Open AccessProceedings
Proceedings 2017, 1(4), 547;

Photonic Gas Sensor Using a Silicon Strip Waveguide

Carinthian Tech Research AG, 9524 Villach, Austria
Infineon Technologies Austria AG, 9500 Villach, Austria
Johannes Kepler University, Institute for Microelectronics and Microsensors, 4040 Linz, Austria
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 25 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [868 KB, uploaded 26 August 2017]


Sensing of gases is a promising area for applications of photonic systems operating in the mid-infrared spectral range. We present an infrared evanescent-field absorption gas sensor based on a silicon strip waveguide, which was specifically designed for CO2 sensing. We discuss finite element simulations that were used to design the strip waveguide and furthermore present experimental data of quantitative CO2 measurements with the devised structures. The first demonstrator device detects concentrations down to 5000 ppm CO2 which is the workplace exposure limit in most jurisdictions.
Keywords: infrared gas sensing; silicon waveguide; evanescent-field absorption infrared gas sensing; silicon waveguide; evanescent-field absorption
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Ranacher, C.; Tortschanoff, A.; Consani, C.; Moridi, M.; Grille, T.; Jakoby, B. Photonic Gas Sensor Using a Silicon Strip Waveguide. Proceedings 2017, 1, 547.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics



[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top