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Journal: Proceedings, 2017
Volume: 1
Number: 331
Article:
Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors
Authors:
by
Ignacio Del Villar, Jose Luis Cruz, Abian Bentor Socorro, Silvia Diaz, Jesus Maria Corres, Francisco Javier Arregui and Ignacio Raul Matias
Link:
https://www.mdpi.com/2504-3900/1/4/331
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