Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction †
Abstract
:1. Introduction
2. Materials and Methods
3. Results
4. Discussion
5. Conclusions
Acknowledgments
Conflicts of Interest
References
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Cantilever Parameters | Transducer Parameters | ||
---|---|---|---|
Length | 16 µm | Material | Si nitride |
Width | 5 µm | Thickness | 15 nm |
Si thickness | 320 nm | Permittivity | εd ≈ 8 |
Eff. stiffness | 1.38 N/m | Transducer efficiency theoret. | 452 pN/V at VDC = −5 V |
fres analytic. | 1.45 MHz | ||
fres experim. | 1.441 MHz | Transducer efficiency exp. | 361 pN/V at VDC = −5 V |
Q factor | 2200 | ||
Qm theror. Charge at VDC = −5 V, VAC = 600 mV | 195 aC | ||
Qm exp.charge at VDC =−5 V, VAC = 600 mV | 125 aC |
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Fuinel, C.; Mathieu, F.; Legrand, B. Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction. Proceedings 2017, 1, 300. https://doi.org/10.3390/proceedings1040300
Fuinel C, Mathieu F, Legrand B. Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction. Proceedings. 2017; 1(4):300. https://doi.org/10.3390/proceedings1040300
Chicago/Turabian StyleFuinel, Cécile, Fabrice Mathieu, and Bernard Legrand. 2017. "Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction" Proceedings 1, no. 4: 300. https://doi.org/10.3390/proceedings1040300
APA StyleFuinel, C., Mathieu, F., & Legrand, B. (2017). Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction. Proceedings, 1(4), 300. https://doi.org/10.3390/proceedings1040300