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Proceedings 2017, 1(4), 300;

Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction

Laboratory for Analysis and Architecture of Systems (LAAS-CNRS), Université de Toulouse, CNRS, 7 Avenue du Colonel Roche, F-31400 Toulouse, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 25 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [871 KB, uploaded 26 August 2017]


We show that nanometer-scale dielectric thin films can act as efficient electromechanical transducers to simultaneously drive and sense the vibration of the first flexural mode of micro/nano-cantilevers. Here, 16 μm-long, 5 μm-wide and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon nitride layer, and electrically detected by charge measurement at megahertz frequencies. The displacement was also checked by optical interferometry, and the electromechanical transduction efficiency is extracted and compared to an analytical modelling.
Keywords: MEMS; high-K; dielectric actuation; charge detection MEMS; high-K; dielectric actuation; charge detection
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Fuinel, C.; Mathieu, F.; Legrand, B. Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction. Proceedings 2017, 1, 300.

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