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Proceedings 2017, 1(4), 306;

Segmented Control of Electrostatically Actuated Bimorph Beams

Air Force Institute of Technology, Wright-Patterson AFB, OH, USA
Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 25 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [523 KB, uploaded 26 August 2017]


This research focused on improving the control and sensing of electrostatically actuated, large deflection bimorph beams for optical beam steering. Current iterations of designs utilize a ‘zipper’ beam and have demonstrated large deflection angles. However, with these devices precise control and deflection measurements can be difficult to achieve. Through using segmented bias channels of doped polysilicon, modeling shows it is possible to control and measure different segments of the actuation arm, thus controlling the amount of tip, tilt, or piston deflection. This paper discusses current and future designs, along with test procedures and modeling results.
Keywords: MEMS; electrostatic actuator; micromirror; bimorph MEMS; electrostatic actuator; micromirror; bimorph
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Waggoner, K.; Lake, R.; Starman, L.; Walton, J. Segmented Control of Electrostatically Actuated Bimorph Beams. Proceedings 2017, 1, 306.

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