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Journal: Quantum Beam Sci., 2021
Volume: 5
Number: 30
Article:
Modification of SiO2, ZnO, Fe2O3 and TiN Films by Electronic Excitation under High Energy Ion Impact
Authors:
by
Noriaki Matsunami, Masao Sataka, Satoru Okayasu and Bun Tsuchiya
Link:
https://www.mdpi.com/2412-382X/5/4/30
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