Next Article in Journal
Magnesium Incorporation in n-CdTe to Produce Wide Bandgap p-Type CdTe:Mg Window Layers
Next Article in Special Issue
Ion-Liquid Based Supercapacitors with Inner Gate Diode-Like Separators
Previous Article in Journal
A Useful Excel-Based Program for Kinetic Model Discrimination
Open AccessArticle

Transfer of Graphene with Protective Oxide Layers

Electronic Imaging Center and ECE Department, New Jersey Institute of Technology (NJIT), Newark, NJ 07102, USA
Center for Nanoscale Materials, Nanoscience and Technology Division, Argonne National Laboratory, Argonne, IL 60439, USA
Author to whom correspondence should be addressed.
ChemEngineering 2018, 2(4), 58;
Received: 15 October 2018 / Revised: 9 November 2018 / Accepted: 19 November 2018 / Published: 3 December 2018
(This article belongs to the Special Issue Advanced Functional Low-dimensional Materials and Their Applications)
Transfer of graphene, grown by chemical vapor deposition (CVD), to a substrate of choice, typically involves the deposition of a polymeric layer (for example, poly(methyl methacrylate) (PMMA), or polydimethylsiloxane, PDMS). These polymers are quite hard to remove without leaving some residues behind. One method to improve the graphene transfer is to coat the graphene with a thin protective oxide layer, followed by the deposition of a very thin polymer layer on top of the oxide layer (much thinner than the usual thickness), followed by a more aggressive polymeric removal method, thus leaving the graphene intact. At the same time, having an oxide layer on graphene may serve applications, such as channeled transistors or sensing devices. Here, we study the transfer of graphene with a protective thin oxide layer grown by atomic layer deposition (ALD). We follow the transfer process from the graphene growth stage through oxide deposition until completion. We report on the nucleation growth process of oxides on graphene, their resultant strain and their optical transmission. View Full-Text
Keywords: oxide layer deposition on graphene; atomic layer deposition (ALD); transfer of graphene; thin oxide films; Raman spectroscopy of graphene oxide layer deposition on graphene; atomic layer deposition (ALD); transfer of graphene; thin oxide films; Raman spectroscopy of graphene
Show Figures

Figure 1

MDPI and ACS Style

Grebel, H.; Stan, L.; Sumant, A.V.; Liu, Y.; Gosztola, D.; Ocola, L.; Fisher, B. Transfer of Graphene with Protective Oxide Layers. ChemEngineering 2018, 2, 58.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

Back to TopTop