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Photonics
Volume 9
Issue 3
10.3390/photonics9030175
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Article

Design and Analysis of a Single Humidity Sensor Based on TDLAS for Water Vapor and Heavy Oxygen Water Vapor Detection

by
Ping Gong
1,
Jian Zhou
1,2,
Zhixuan Er
1,2,
Yu Ju
1 and
Liang Xie
1,2,*
1
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2
College of Materials Science and Opto-Electronic Technology, Chinese Academy of Sciences, Beijing 100049, China
*
Author to whom correspondence should be addressed.
Photonics 2022, 9(3), 175; https://doi.org/10.3390/photonics9030175
Submission received: 25 January 2022 / Revised: 21 February 2022 / Accepted: 9 March 2022 / Published: 11 March 2022
(This article belongs to the Special Issue Optical Instrumentation)
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Abstract

In this paper, a single humidity sensor for water vapor and heavy oxygen water vapor detection is presented. The sensor is based on tunable diode laser absorption spectroscopy (TDLAS) and thus has high sensitivity, good selectivity, and a short response time. A 1372 nm distributed feedback (DFB) diode laser is utilized as the light source, the wavelength tuning range of which covers the absorption lines of water vapor and heavy oxygen water vapor. A Herriott gas cell with 12 m optical length is designed for signal-to-noise ratio (SNR) enhancement. The sensor can distinguish between water vapor and heavy oxygen water vapor effectively. The accuracy of water detection is within ±0.5% RH. The accuracy of heavy oxygen water vapor detection is within ±1.0% RH.
Keywords: humidity; heavy oxygen water; TDLAS humidity; heavy oxygen water; TDLAS

Share and Cite

MDPI and ACS Style

Gong, P.; Zhou, J.; Er, Z.; Ju, Y.; Xie, L. Design and Analysis of a Single Humidity Sensor Based on TDLAS for Water Vapor and Heavy Oxygen Water Vapor Detection. Photonics 2022, 9, 175. https://doi.org/10.3390/photonics9030175

AMA Style

Gong P, Zhou J, Er Z, Ju Y, Xie L. Design and Analysis of a Single Humidity Sensor Based on TDLAS for Water Vapor and Heavy Oxygen Water Vapor Detection. Photonics. 2022; 9(3):175. https://doi.org/10.3390/photonics9030175

Chicago/Turabian Style

Gong, Ping, Jian Zhou, Zhixuan Er, Yu Ju, and Liang Xie. 2022. "Design and Analysis of a Single Humidity Sensor Based on TDLAS for Water Vapor and Heavy Oxygen Water Vapor Detection" Photonics 9, no. 3: 175. https://doi.org/10.3390/photonics9030175

APA Style

Gong, P., Zhou, J., Er, Z., Ju, Y., & Xie, L. (2022). Design and Analysis of a Single Humidity Sensor Based on TDLAS for Water Vapor and Heavy Oxygen Water Vapor Detection. Photonics, 9(3), 175. https://doi.org/10.3390/photonics9030175

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