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Journal: Photonics, 2022
Volume: 9
Number: 714

Article: Equivalent Measurement and Real-Time Compensation of Error Caused by Intensity Change in Deep Sub-Nanometer Displacement Measuring Interferometry
Authors: by Jianing Wang, Yunke Sun, Xu Xing, Pengcheng Hu, Di Chang and Jiubin Tan
Link: https://www.mdpi.com/2304-6732/9/10/714

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