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Journal: Photonics, 2023
Volume: 10
Number: 638
Article:
The Inverse Optimization of Lithographic Source and Mask via GA-APSO Hybrid Algorithm
Authors:
by
Junbo Liu, Ji Zhou, Haifeng Sun, Chuan Jin, Jian Wang and Song Hu
Link:
https://www.mdpi.com/2304-6732/10/6/638
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